Community Research and Development Information Service - CORDIS

High Precision, Automated CD Metrology Station

From 1990-01-01 to 1991-06-30

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Netherlands

Objective

Coordinator

NEDERLANDSE PHILIPS BEDRIJVEN BV
Netherlands
KASTANJELAAN, 1218
5600 MD EINDHOVEN
Netherlands
See on map
Administrative contact: TOLNER
Tel.: +31-40-766223
Fax: +31-4O-766164

Participants

CCLRC Rutherford Appleton Laboratory (RAL)
United Kingdom
Chilton
OX11 0QX Didcot
United Kingdom
Administrative contact: LAWRENCE-WILSON
Tel.: +44-235-445475
Fax: +44-235-445794
INTEGRATED CIRCUIT TESTING
Germany
KLAUSNERRING 1A
85551 KIRCHHEIM
Germany
See on map
Administrative contact: Juergen FROSIEN
Tel.: +49-89-90999417
Fax: +49-89-90999429
Interuniversitair Mikroelektronica Centrum
Belgium
Kapeldreef 75
3030 Heverlee
Belgium
See on map
Administrative contact: Nanda SAMARAKONE
Tel.: +32-16-281351
Fax: +32-16-229400
NEDERLANDSE PHILIPS BEDRIJVEN BV
Netherlands
PROF. HOLSTLAAN, 4
5656 AA EINDHOVEN
Netherlands
See on map
Administrative contact: Michiel BAKHUIZEN
Tel.: +31-80-533670
Fax: +31-80-564053
NEDERLANDSE PHILIPS BEDRIJVEN BV
Netherlands
GERSTEWEG, 2
6534 AE NIJMEGEN
Netherlands
See on map
Administrative contact: VAN DEN BERG
Tel.: +31-40-742137
Fax: +31-40-744648
Siemens AG
Germany
Balanstraße 73
81541 München
Germany
See on map
Administrative contact: Rudolf LAUBMEIJER
Tel.: +49-89-63645054
Fax: +49-89-63648666
Thomson Microelectronics Srl (SGS)
Italy
Via Carlo Olivetti
20041 Agrate Brianza Milano
Italy
Administrative contact: Pier Luigi CROTTI
Tel.: +39-39-6035803
Fax: +39-39-6035233
Follow us on: RSS Facebook Twitter YouTube Managed by the EU Publications Office Top