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Ultra-bright nanoscale SEM-on-a-chip

Objective

The technological objective of MONARCH is to produce the world's first scanning electron microscope (SEM) on-a-chip. Such an instrument would represent a step-change in electron beam (e-beam) technology comparable with the introduction of the silicon chip to electronics. This device will be orders of magnitude smaller than existing technology, would operate at lower voltages and have an order of magnitude higher resolution for a fraction of the cost of a current state-of-the-art SEM. It would provide the first instrument capable of rapidly scanning a surface layer and producing an image with elemental identification at atomic resolution.

This disruptive technology has dramatic implications for many sectors other than electron microscopy, including e-beam lithography, genetic sequencing, ultra-high density data storage and focussed ion beam milling. In particular it is expected to be a key enabling tool for the booming sectors of nanotechnology and MNEMS (micro-nano-electromechanical systems).

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Coordinator

VIVID COMPONENTS LTD.

Address

23, Devon Square
Newton Abbot

United Kingdom

Participants (8)

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CHALMERS TEKNISKA HOEGSKOLA AB

Sweden

CONCEPT TO VOLUME B.V.

Netherlands

NANOFACTORY INSTRUMENTS AB

Sweden

NFAB LTD.

United Kingdom

OMICRON NANO TECHNOLOGY GMBH

Germany

ROPER INDUSTRIES LTD.

United Kingdom

UNIVERSITEIT TWENTE

Netherlands

UNIVERSITY OF SALFORD

United Kingdom

Project information

Grant agreement ID: 32732

  • Start date

    1 January 2007

  • End date

    30 June 2009

Funded under:

FP6-SME

  • Overall budget:

    € 2 109 816

  • EU contribution

    € 1 391 898

Coordinated by:

VIVID COMPONENTS LTD.

United Kingdom