CORDIS
EU research results

CORDIS

English EN
Miniaturised photoacoustic gas sensor based on patented interferometric readout and novel photonic integration technologies

Miniaturised photoacoustic gas sensor based on patented interferometric readout and novel photonic integration technologies

Objective

High-sensitivity gas sensors measure the presence of trace gases. They have a wide range of applications. Finnish SME Gasera has recently developed a MEMS-based mechanism for detecting the pressure waves created in photo-acoustic cells. This innovation can be used to realize infrared gas sensors of extreme sensitivity. Instead of the usual microphone (membrane with capacitive readout) the Gasera cell contains a "free-standing" silicon cantilever. The mechanical movement of the free end of the cantilever is 100x larger than the centre of a fixed membrane. Furthermore, the movement of the cantilever is detected interferometrically not capacitively. The resulting improvement in sensitivity by these innovations is about three orders of magnitude over the prior art. Three international patent applications are pending. Whereas other optical gas detection methods can not be miniaturized because of the long optical pathlengths needed for high sensitivity, theoretical analyses predict that the cantilever PA cell can be miniaturized. The goal is to build and demonstrate a miniaturised sensor sub-system that achieves two or three orders of magnitude better sensitivity (on sub-ppm level!) than other optical measurement methods could achieve at similar package volume. A much lower cost and wider temperature range of operation are also predicted.
Keywordsphoto-acoustic, gas detection; high sensitivity; cantilever interferometric readout
Leaflet | Map data © OpenStreetMap contributors, Credit: EC-GISCO, © EuroGeographics for the administrative boundaries

Coordinator

TEKNOLOGIAN TUTKIMUSKESKUS VTT

Address

Tekniikantie 4 A
02044 Vtt Espoo

Finland

Activity type

Research Organisations

EU Contribution

€ 590 326

Administrative Contact

Eija Hyvönen (Ms.)

Participants (8)

Sort alphabetically

Sort by EU Contribution

Expand all

DRAGERWERK AG & CO KGAA

Germany

EU Contribution

€ 47 781

TURUN YLIOPISTO

Finland

EU Contribution

€ 218 000

GASERA OY

Finland

EU Contribution

€ 336 042

SELEX SISTEMI INTEGRATI SPA

Italy

EU Contribution

€ 129 823

DOBLE TRANSINOR AS

Norway

EU Contribution

€ 59 944

HONEYWELL ROMANIA SRL

Romania

IOFFE PHYSICO-TECHNICAL INSTITUTE

Russia

EU Contribution

€ 218 680

QINETIQ LIMITED

United Kingdom

EU Contribution

€ 249 404

Project information

Grant agreement ID: 224625

Status

Closed project

  • Start date

    1 April 2008

  • End date

    30 September 2012

Funded under:

FP7-ICT

  • Overall budget:

    € 2 549 342

  • EU contribution

    € 1 850 000

Coordinated by:

TEKNOLOGIAN TUTKIMUSKESKUS VTT

Finland