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Multi-functional Analytical Focussed ion beam tool for nanotechnology

Objective

The project FIBLYS aims at developing an innovative nanostructuring, nanomanipulation and nanoanalysis instrument: a hybrid scanning probe (SPM) and dual beam focussed ion beam (FIB) instrument (including scanning electron microscopy (SEM) capabilities). In addition to an instrument based on conventional dual beam FIB(SEM) technology, an SPM/FIB(SEM) microscope will use both techniques, integrated in a compact setup offering capabilities that not only combine the techniques but allow for nanoanalysis and nanostructuring/-manipulation options that the single instrument or sequential use of the techniques is unable to achieve. This FIBLYS hybrid device will allow to use all FIB capabilities while imaging the procedures with the integrated SEM. The SEM has the options of chemical analysis through Energy Dispersive X-ray analysis (EDX) and structural analysis through Electron Backscatter diffraction (EBSD). The combination of SEM and SPM provides for the combination of nano-scale chemistry and crystallography imaging via electron-matter interactions (EDX, EBSD) with the information from tip-sample interactions like topography or magnetic/electrostatic force imaging. Combining electron-matter and tip-sample interactions, the FIBLYS hybrid instrument will for the first time allow to probe with nano-scale resolution many electron-matter interactions like detection of electron beam induced current (EBIC), or cathodoluminescence or phonons, or backscattered electrons directly at the surface with cantilever based sensors. This project will merge FIB(SEM) and SPM manufacturers at European level and reinforce their competitiveness. The partnership reflects the excellence and competences needed in this project, only possible through transnational co-operative research of six SMEs (SPM and FI(SEM) manufacturers, specialists in SPM and SEM control, expertise in electron/ion optics, cantilever manufacturers for SPM techniques as well as three RTD performers.

Field of science

  • /natural sciences/physical sciences/optics
  • /natural sciences/earth and related environmental sciences/geology/mineralogy/crystallography
  • /natural sciences/physical sciences/astronomy/planetary science/planetary geology
  • /engineering and technology/nanotechnology

Call for proposal

FP7-NMP-2007-SME-1
See other projects for this call

Funding Scheme

CP-TP - Collaborative Project targeted to a special group (such as SMEs)

Coordinator

LEIBNIZ-INSTITUT FUER PHOTONISCHE TECHNOLOGIEN E.V.
Address
Albert Einstein Strasse 9
07745 Jena
Germany
Activity type
Research Organisations
EU contribution
€ 545 720
Administrative Contact
Frank Sondermann (Mr.)

Participants (8)

TESCAN AS
Czechia
EU contribution
€ 1 088 000
Address
Libusina Tr 21
62300 Brno
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Hana Janku (Ms.)
TOFWERK AG
Switzerland
EU contribution
€ 179 216
Address
Uttingenstrasse 22
3600 Thun
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Katrin Fuhrer (Dr.)
SMARACT GMBH
Germany
EU contribution
€ 345 840
Address
Harmoniestrasse 22
26135 Oldenburg
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Axel Kortschak (Mr.)
CARL VON OSSIETZKY UNIVERSITAET OLDENBURG

Participation ended

Germany
Address
Ammerlaender Heerstrasse 114-118
26129 Oldenburg
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Sabine Geruschke (Ms.)
EIDGENOSSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT
Switzerland
EU contribution
€ 399 944
Address
Ueberlandstrasse 129
8600 Dubendorf
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Johann Michler (Dr.)
UNIVERSITE DE REIMS CHAMPAGNE-ARDENNE
France
EU contribution
€ 399 882
Address
Boulevard De La Paix 9 Villa Douce
51100 Reims
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Nathalie Rau (Ms.)
OFFIS EV
Germany
EU contribution
€ 356 060
Address
Escherweg 2
26121 Oldenburg
Activity type
Research Organisations
Administrative Contact
Albert Sill (Dr.)
Klinik Max Planck Institut für Psychiatrie
Germany
EU contribution
€ 93 600
Address
Hofgartenstrasse 8
80539 Muenchen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Sabine König (Dr.)