Community Research and Development Information Service - CORDIS

Improved i-Line Steppers

From 1992-05-27 to 1994-11-26

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Netherlands

Objective

Coordinator

ASM LITHOGRAPHY
Netherlands
MEIERIJWEG 15, 8805
5503 HN VELDHOVEN
Netherlands
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Administrative contact: D'HOORE
Tel.: +31-40-580800
Fax: +31-40-580709

Participants

CARL ZEISS GMBH
Germany
CARL-ZEISS-STRAßE 4-54
73447 OBERKOCHEN
Germany
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Administrative contact: Gerhard ITTNER
Tel.: +49-7364-202768
Fax: +49-7364-204509
Centre National d'Études des Télécommunications (CNET)
France
98 chemin du Vieux Chêne
38243 Meyland
France
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Administrative contact: Jean-Marc DUMANT
Tel.: +33-76764171
Fax: +33-76903443
Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV (FhG)
Germany
Wetterkreuz 13
91058 Erlangen
Germany
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Administrative contact: Gerhard TEMMEL
Tel.: +49-9131-810445
Fax: +49-9131-810450
IBM France SA
France
3-5 PLACE VENDOME
75001 PARIS
France
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Administrative contact: Yves STEUNOU
Tel.: +33-1-60886963
Fax: +33-1-60880649
PHILIPS INTERNATIONAL BV
Netherlands
GERSTWEG, 2
6534 AE NIJMEGEN
Netherlands
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Administrative contact: Loek TEN DAM
Tel.: +31-80-532481
Fax: +31-80-533602
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