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Silicon Quantum Wire Transistors

Project description


Nanoelectronics Technology
SQWIRE develops industry compatible CMOS technology based on novel Si nanowire transistor structures.

The aim of the SQWIRE project is to develop a disruptive, industry-compatible CMOS technology based on novel silicon nanowire transistor structures. As has been demonstrated both theoretically and experimentally, nanowire MOS transistors can be fabricated at wafer level using silicon-on-insulator (SOI) substrates and these novel devices have shown electrical properties that are comparable or even superior to those of regular transistors. Two such novel devices are the Gated Resistor (a junctionless transistor simulated, prototype fabricated and patented) and the variable-barrier tunnel transistor (VBT, simulated and patented). To obtain industrial validation, fabrication routes will be developed for these devices on novel 300 mm SOI wafers with silicon film thicknesses of only 10 nm. These routes will be underpinned by process development targeting atom-scale control of the silicon film thickness across the wafer. Device performance will be characterised at die-level and evaluated in a statistically meaningful manner at wafer level. The extracted parameters will serve as the basis for the development of a compact model of the Gated Resistor devices, which can be used for further circuit design and the validation of advanced numerical simulations. The fabrication process for the first device (Gated Resistor) is less complex and more flexible than that of regular transistors. It has the potential of increasing yield and reducing the price of integrated circuits. Furthermore, the Gated Resistor offers the promise of superior scaling to sub-22 nm dimensions compared to regular transistors. In addition, the process can easily be implemented in semiconductor materials other than silicon. The second device (Variable Barrier Transistor) is capable of providing subthreshold slopes sharper than any conventional transistor. This permits one to reduce the supply voltage of integrated circuits, and hence their energy consumption.

Call for proposal

FP7-ICT-2009-5
See other projects for this call

Coordinator

UNIVERSITY COLLEGE CORK - NATIONAL UNIVERSITY OF IRELAND, CORK
Address
Western Road
T12 YN60 Cork
Ireland
Activity type
Higher or Secondary Education Establishments
EU contribution
€ 690 851
Administrative Contact
Conor Delaney (Mr.)

Participants (9)

MAGWEL
Belgium
EU contribution
€ 284 499
Address
Vital Decosterstraat 44 Bus 27
3000 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Bart De Smedt (Mr.)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 363 006
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
Administrative Contact
Christine Van Houtven (Ms.)
UNIVERSITAT ROVIRA I VIRGILI
Spain
EU contribution
€ 251 036
Address
Carrer De Escorxador
43003 Tarragona
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Rosa Solà Alberich (Prof.)
SOITEC SA
France
EU contribution
€ 125 113
Address
Chemin Des Franques - Parc Technologique Des Fontaines
38190 Bernin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Nelly Kernevez (Dr.)
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
EU contribution
€ 951 673
Address
Rue Leblanc 25
75015 Paris 15
Activity type
Research Organisations
Administrative Contact
Marie-Laure Page (Ms.)
INSTITUT POLYTECHNIQUE DE GRENOBLE
France
EU contribution
€ 289 424
Address
Avenue Felix Viallet 46
38031 Grenoble Cedex 1
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Valerie Miscioscia (Ms.)
INTEL RESEARCH AND INNOVATION IRELAND LIMITED
Ireland
EU contribution
€ 194 398
Address
Collinstown Industrial Estate
. Leixlip Kildare
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Bernard Capraro (Mr.)
UNIVERSITE JOSEPH FOURIER GRENOBLE 1
France
EU contribution
€ 0
Address
Avenue Centrale, Domaine Universitaire 621
38041 Grenoble
Activity type
Higher or Secondary Education Establishments
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS
France
EU contribution
€ 0
Address
Rue Michel Ange 3
75794 Paris
Activity type
Other