Skip to main content

Semiconductor Equipment Assessment Leveraging Innovation

Project description

Nanoelectronics Technology Seal is an EC-funded project covering semiconductor equipment assessment to strengthen the European semiconductor equipment industry. SEAL is an integrated project consisting of 17 equipment assessment sub-projects in the area of semiconductor manufacturing equipment. The assessment themes are equally spread amongst processing and metrology equipment, heading beyond the current state-of-the-art both for More Moore and More than Moore applications. The strategic objective of SEAL is to effectively combine efforts, resources and expertise in the joint assessment of novel equipment supported by cross-cut R&D dedicated to the identified needs of the assessment sub-projects. For Lithography, the key areas of illumination systems for mask aligners, EUV mask manufacturing and intelligent overlay management are addressed as well as massively parallel e-beam lithography. In addition, three important processes are addressed: low temperature oxidation, cleaning of sensitive interconnect stacks/structures and ion implantation for ultra shallow junctions and defect engineering. For metrology and analysis, the main focus is on enabling innovative systems to efficiently contribute to at-line and in-line monitoring and control within semiconductor facilities. Without such equipment, it will not be possible to validate progressively advanced processes during development and manufacturing.Cross-cut R&D activities relating to all equipment assessment sub-projects are covered including APC, model based control, equipment simulation, enhanced wafer and equipment logistics, advanced communication and man machine-interfaces, and virtual equipment engineering. A common approach for the assessment activities will be utilised with specifications that will be refined for each equipment type for the progressively emerging technology nodes.Overall, SEAL will strengthen the European equipment manufacturing industry in an ideal and sustainable way by combining advanced R&D topics in equipment sub-projects involving a wide community of users, research institutes and equipment suppliers with many SMEs.

Field of science

  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor

Call for proposal

FP7-ICT-2009-5
See other projects for this call

Funding Scheme

CP - Collaborative project (generic)

Coordinator Contact

Lothar Pfizner (Mr.)

Coordinator

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Address
Hansastrasse 27C
80686 Munchen
Germany
Activity type
Research Organisations
EU contribution
€ 2 404 635
Administrative Contact
Andrea Zeumann (Ms.)

Participants (38)

LAM RESEARCH AG

Participation ended

Austria
EU contribution
€ 0
Address
Sez-strasse 1
9500 Villach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Harald Kraus (Mr.)
FACHHOCHSCHULE WIENER NEUSTADT FUR WIRTSCHAFT UND TECHNIK GMBH
Austria
EU contribution
€ 50 128
Address
Johannes Gutenbergstrasse 3
2700 Wiener Neustadt
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Helmut Pfeffer (Mr.)
AMS AG
Austria
EU contribution
€ 38 875
Address
Tobelbaderstrasse 30
8141 Unterpremstaetten
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Yasmine Pree (Ms.)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 1 260 031
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
Administrative Contact
Christine Van Houtven (Ms.)
Reinhardt Microtech AG
Switzerland
EU contribution
€ 68 078
Address
Aeulistrasse
CH - 7323 Wangs
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Wolfgang Tschanun (Dr.)
SUSS MICROOPTICS SA
Switzerland
EU contribution
€ 145 232
Address
Rouges Terres 61
2068 Hauterive
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Kristina Schulz (Mrs.)
SUSS MicroTec Photomask Equipment GmbH & Co. KG
Germany
EU contribution
€ 49 352
Address
Ferdinand-von-steinbeis-ring 10
75447 Sternenfels
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Peter Dreß (Dr.)
ICT Integrated Circuit Testing GmbH
Germany
EU contribution
€ 108 000
Address
Ammerthalstrasse 20
85551 Heimstetten
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Marc Gurman (Mr.)
Jenoptik Automatisierungstechnik GmbH
Germany
EU contribution
€ 81 412
Address
Konrad-zuse-strasse
07745 Jena
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Hans-Ulrich Zuehlke (Dr.)
HQ-Dielectrics GmbH
Germany
EU contribution
€ 361 400
Address
Dornstadter Weg 9/1
89160 Dornstadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Alexander Gschwandtner (Dr.)
Oxford Instruments GmbH
Germany
EU contribution
€ 49 733
Address
Otto-von-guericke Ring
65205 Wiesbaden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Rune Gehrlein (Mr.)
NANDA TECHNOLOGIES GMBH
Germany
EU contribution
€ 376 100
Address
Lise-meitner-strasse
85716 Unterschleissheim
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Johannes von Borries (Mr.)
Landshut Silicon Foundry GmbH

Participation ended

Germany
EU contribution
€ 31 800
Address
Jenaerstrasse 1
84034 Landshut
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Elke Heilmeier (Ms.)
Fries Research & Technology GmbH
Germany
EU contribution
€ 89 660
Address
Friedrich-ebert-straße
51429 Bergisch Gladbach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Thomas Fries (Dr.)
SUSS MicroTec

Participation ended

Germany
EU contribution
€ 0
Address
Schleissheimerstrasse 90
85748 Garching
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Markus Gabriel (Mr.)
INFINEON TECHNOLOGIES AG
Germany
EU contribution
€ 274 985
Address
Am Campeon 1-15
85579 Neubiberg
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Bernhard Scholz (Mr.)
Protec Carrier Systems GmbH
Germany
EU contribution
€ 149 999
Address
Birlenbacher Strasse
57078 Siegen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Sebastian Wagner (Mr.)
SILTRONIC AG
Germany
EU contribution
€ 103 516
Address
Hanns Seidel Platz 4
81737 Munchen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Thomas Renner (Dr.)
GLOBALFOUNDRIES Dresden Module One LLC & Co. KG
Germany
EU contribution
€ 114 420
Address
Wilschdorfer Landstrasse 101
01109 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Petra Hetzer (Ms.)
ACP - ADVANCED CLEAN PRODUCTION GMBH
Germany
EU contribution
€ 123 000
Address
Rontgenstrasse 30
73730 Esslingen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Josef Gentischer (Mr.)
PVA TEPLA ANALYTICAL SYSTEMS GMBH
Germany
EU contribution
€ 405 758
Address
Deutschordenstrasse 38
73463 Westhausen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Peter Czurratis (Dr.)
SUSS MicroTec Lithography GmbH
Germany
EU contribution
€ 180 533
Address
Schleissheimer Strasse
85748 Garching
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Susanne Mölter (Ms.)
FUNDACIO INSTITUT CATALA DE NANOCIENCIA I NANOTECNOLOGIA
Spain
EU contribution
€ 50 555
Address
Campus De La Uab Edifici Q Icn2
08193 Bellaterra (Barcelona)
Activity type
Research Organisations
Administrative Contact
Stella Veciana (Dr.)
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
EU contribution
€ 863 267
Address
Rue Leblanc 25
75015 Paris 15
Activity type
Research Organisations
Administrative Contact
Marie-Laure Page (Ms.)
STMICROELECTRONICS CROLLES 2 SAS
France
EU contribution
€ 202 401
Address
Rue Jean Monnet 850
38920 Crolles
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Dominique Goubier (Mr.)
PFEIFFER VACUUM
France
EU contribution
€ 132 224
Address
98 Avenue De Brogny
74000 Annecy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
JACQUES DE SAINT TRIVIER (Mr.)
ION BEAM SERVICES
France
EU contribution
€ 215 986
Address
Rue Gaston Imbert Prolongee
13790 Rousset
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Frank TORREGROSA (Dr.)
SOITEC SA

Participation ended

France
EU contribution
€ 0
Address
Chemin Des Franques - Parc Technologique Des Fontaines
38190 Bernin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Robert Langer (Dr.)
TOPPAN PHOTOMASKS FRANCE SAS
France
EU contribution
€ 85 437
Address
Rousset Parc Club, Avenue Francis Perrin 118
13106 Rousset
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
MICHEL TISSIER (Dr.)
SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG
Hungary
EU contribution
€ 93 250
Address
Prielle Kornelia Utca 4/A.
1117 Budapest
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Anita Farkasinszki (Ms.)
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 413 000
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Yoram Uziel (Mr.)
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 85 625
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Daniel Kandel (Dr.)
MEMC ELECTRONIC MATERIALS SPA
Italy
EU contribution
€ 22 500
Address
Viale Gherzi
28100 Novara
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Fabrizio Viker (Mr.)
Numonyx Italy Srl
Italy
EU contribution
€ 55 720
Address
Via Camillo Olivetti 2
20864 Agrate Brianza
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
MANUELA SEMINARA (Ms.)
MAPPER LITHOGRAPHY B.V.
Netherlands
EU contribution
€ 81 675
Address
Computerlaan 15
2628 XK Delft
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Bert Jan Kampherbeek (Mr.)
Metryx Ltd
United Kingdom
EU contribution
€ 331 668
Address
Unit 2 A, Manor Park, Nailsea Wall Lane
BS48 4DD Nailsea
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Mark Berry (Mr.)
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK
United States
EU contribution
€ 0
Address
State Street 35
12201 Albany Ny
Activity type
Other
Administrative Contact
Michael Liehr (Prof.)
Intel Corporation
United States
EU contribution
€ 0
Address
Orange Street
19801 Wilmington New Castle De
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Gilroy Vandentop (Dr.)