Servizio Comunitario di Informazione in materia di Ricerca e Sviluppo - CORDIS

Semiconductor Equipment Assessment Leveraging Innovation

Dal 2010-06-01 al 2013-09-30, progetto concluso | SEAL Sito web

Dettagli del progetto

Costo totale:

EUR 14 059 075

Contributo UE:

EUR 9 099 955

Coordinato in:

Germany

Invito a presentare proposte:

FP7-ICT-2009-5See other projects for this call

Meccanismo di finanziamento:

CP - Collaborative project (generic)

Description

Seal is an EC-funded project covering semiconductor equipment assessment to strengthen the European semiconductor equipment industry.
SEAL is an integrated project consisting of 17 equipment assessment sub-projects in the area of semiconductor manufacturing equipment. The assessment themes are equally spread amongst processing and metrology equipment, heading beyond the current state-of-the-art both for More Moore and More than Moore applications. The strategic objective of SEAL is to effectively combine efforts, resources and expertise in the joint assessment of novel equipment supported by cross-cut R&D dedicated to the identified needs of the assessment sub-projects. For Lithography, the key areas of illumination systems for mask aligners, EUV mask manufacturing and intelligent overlay management are addressed as well as massively parallel e-beam lithography. In addition, three important processes are addressed: low temperature oxidation, cleaning of sensitive interconnect stacks/structures and ion implantation for ultra shallow junctions and defect engineering. For metrology and analysis, the main focus is on enabling innovative systems to efficiently contribute to at-line and in-line monitoring and control within semiconductor facilities. Without such equipment, it will not be possible to validate progressively advanced processes during development and manufacturing.Cross-cut R&D activities relating to all equipment assessment sub-projects are covered including APC, model based control, equipment simulation, enhanced wafer and equipment logistics, advanced communication and man machine-interfaces, and virtual equipment engineering. A common approach for the assessment activities will be utilised with specifications that will be refined for each equipment type for the progressively emerging technology nodes.Overall, SEAL will strengthen the European equipment manufacturing industry in an ideal and sustainable way by combining advanced R&D topics in equipment sub-projects involving a wide community of users, research institutes and equipment suppliers with many SMEs.

Obiettivo

SEAL is a project for an integrated project consisting of 17 equipment assessment sub-projects in the area of semiconductor manufacturing equipment. The assessment themes are equally spread amongst processing and metrology equipment, heading beyond the current state-of-the-art both for More Moore and More than Moore applications. The strategic objective of SEAL is to effectively combine efforts, resources and expertise in the joint assessment of novel equipment supported by cross-cut R&D dedicated to the identified needs of the assessment sub-projects.For Lithography, the key areas of illumination systems for mask aligners, EUV mask manufacturing and intelligent overlay management are addressed as well as massively parallel e-beam lithography. In addition, three important processes are addressed: low temperature oxidation, cleaning of sensitive interconnect stacks/structures and ion implantation for ultra shallow junctions and defect engineering. For metrology and analysis, the main focus is on enabling innovative systems to efficiently contribute to at-line and in-line monitoring and control within semiconductor facilities. Without such equipment, it will not be possible to validate progressively advanced processes during development and manufacturing.Cross-cut R&D activities relating to all equipment assessment sub-projects are covered including APC, model based control, equipment simulation, enhanced wafer and equipment logistics, advanced communication and man machine-interfaces, and virtual equipment engineering. A common approach for the assessment activities will be utilised with specifications that will be refined for each equipment type for the progressively emerging technology nodes.Overall, SEAL will strengthen the European equipment manufacturing industry in an ideal and sustainable way by combining advanced R&D topics in equipment sub-projects involving a wide community of users, research institutes and equipment suppliers with many SMEs.

Contatto coordinatore

Lothar Pfizner
E-mail

Coordinatore

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany

Contributo UE: EUR 2 404 635


HANSASTRASSE 27C
80686 MUNCHEN
Germany
Activity type: Research Organisations
Contatto amministrativo: Andrea Zeumann
Tel.: +49 89 12052327
Fax: +49 89 1205772723
E-mail

Partecipanti

LAM RESEARCH AG
Partecipazione terminata
Austria

Contributo UE: EUR 0


SEZ-STRASSE 1
9500 VILLACH
Austria
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Harald Kraus
Tel.: +43 4242 204 924
Fax: +43 4242 204 924
E-mail
FACHHOCHSCHULE WIENER NEUSTADT FUR WIRTSCHAFT UND TECHNIK GMBH
Austria

Contributo UE: EUR 50 128


JOHANNES GUTENBERGSTRASSE 3
2700 WIENER NEUSTADT
Austria
Activity type: Higher or Secondary Education Establishments
Contatto amministrativo: Helmut Pfeffer
Tel.: +43262289084116
Fax: +43262289084141
E-mail
AMS AG
Austria

Contributo UE: EUR 38 875


TOBELBADERSTRASSE 30
8141 UNTERPREMSTAETTEN
Austria
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Yasmine Pree
Tel.: +4331365005474
E-mail
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

Contributo UE: EUR 1 260 031


KAPELDREEF 75
3001 LEUVEN
Belgium
Activity type: Research Organisations
Contatto amministrativo: Christine Van Houtven
Tel.: +3216281613
Fax: +3216281812
E-mail
Reinhardt Microtech AG
Switzerland

Contributo UE: EUR 68 078


Aeulistrasse
CH - 7323 Wangs
Switzerland
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Wolfgang Tschanun
Tel.: +41 817200456
Fax: +41 81 720 04 50
E-mail
SUSS MICROOPTICS SA
Switzerland

Contributo UE: EUR 145 232


ROUGES TERRES 61
2068 HAUTERIVE
Switzerland
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Kristina Schulz
Tel.: +41327205104
Fax: +41327205713
E-mail
SUSS MicroTec Photomask Equipment GmbH & Co. KG
Germany

Contributo UE: EUR 49 352


Ferdinand-von-Steinbeis-Ring 10
75447 Sternenfels
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Peter Dreß
Tel.: +49704541235
Fax: +49704541239
E-mail
ICT Integrated Circuit Testing GmbH
Germany

Contributo UE: EUR 108 000


Ammerthalstrasse 20
85551 Heimstetten
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Marc Gurman
Tel.: +498990999467
Fax: +498990999429
E-mail
Jenoptik Automatisierungstechnik GmbH
Germany

Contributo UE: EUR 81 412


Konrad-Zuse-Strasse
07745 Jena
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Hans-Ulrich Zuehlke
Tel.: +49 3641 653890
Fax: +49 3641 65 13 3890
E-mail
HQ-Dielectrics GmbH
Germany

Contributo UE: EUR 361 400


Dornstadter Weg 9/1
89160 Dornstadt
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Alexander Gschwandtner
Tel.: +491728338658
Fax: +497348204928
E-mail
Oxford Instruments GmbH
Germany

Contributo UE: EUR 49 733


Otto-von-Guericke Ring
65205 Wiesbaden
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Rune Gehrlein
Tel.: +496122937156
Fax: +496122937178
E-mail
NANDA TECHNOLOGIES GMBH
Germany

Contributo UE: EUR 376 100


Lise-Meitner-Strasse
85716 Unterschleissheim
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Johannes von Borries
Tel.: +49 89 4523558 21
Fax: +49 89 4523558 70
E-mail
Landshut Silicon Foundry GmbH
Partecipazione terminata
Germany

Contributo UE: EUR 31 800


Jenaerstrasse 1
84034 LANDSHUT
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Elke Heilmeier
Tel.: +498716840
Fax: +49871684150
E-mail
Fries Research & Technology GmbH
Germany

Contributo UE: EUR 89 660


Friedrich-Ebert-Straße
51429 Bergisch Gladbach
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Thomas Fries
Tel.: +492204842430
Fax: +492204842431
E-mail
SUSS MicroTec
Partecipazione terminata
Germany

Contributo UE: EUR 0


SCHLEISSHEIMERSTRASSE 90
85748 GARCHING
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Markus Gabriel
Tel.: +49 8932007339
Fax: +49 89 32007162
E-mail
INFINEON TECHNOLOGIES AG
Germany

Contributo UE: EUR 274 985


AM CAMPEON 1-15
85579 NEUBIBERG
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Bernhard Scholz
Tel.: +49 89 234 22339
Fax: +49 89 234 955 0395
E-mail
Protec Carrier Systems GmbH
Germany

Contributo UE: EUR 149 999


Birlenbacher Strasse
57078 Siegen
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Sebastian Wagner
Tel.: +49 271 8904116
Fax: +49 271 8904119
E-mail
SILTRONIC AG
Germany

Contributo UE: EUR 103 516


HANNS SEIDEL PLATZ 4
81737 MUNCHEN
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Thomas Renner
Tel.: +498985643230
Fax: +498985643239
E-mail
GLOBALFOUNDRIES Dresden Module One LLC & Co. KG
Germany

Contributo UE: EUR 114 420


Wilschdorfer Landstrasse 101
01109 Dresden
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Petra Hetzer
Tel.: +49 351 2774514
Fax: +49 351 277 9 4514
E-mail
ACP - ADVANCED CLEAN PRODUCTION GMBH
Germany

Contributo UE: EUR 123 000


RONTGENSTRASSE 30
73730 ESSLINGEN
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Josef Gentischer
Tel.: +49715179068
E-mail
PVA TEPLA ANALYTICAL SYSTEMS GMBH
Germany

Contributo UE: EUR 405 758


DEUTSCHORDENSTRASSE 38
73463 WESTHAUSEN
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Peter Czurratis
Tel.: +4973613765230
Fax: +49736137652313
E-mail
SUSS MicroTec Lithography GmbH
Germany

Contributo UE: EUR 180 533


SCHLEISSHEIMER STRASSE
85748 GARCHING
Germany
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Susanne Mölter
Tel.: +49 89 32007109
Fax: +49 89 32007162
E-mail
FUNDACIO INSTITUT CATALA DE NANOCIENCIA I NANOTECNOLOGIA
Spain

Contributo UE: EUR 50 555


CAMPUS DE LA UAB EDIFICI Q ICN2
08193 BELLATERRA (BARCELONA)
Spain
Activity type: Research Organisations
Contatto amministrativo: Stella Veciana
Tel.: +34 935813840
Fax: +34 935814747
E-mail
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France

Contributo UE: EUR 863 267


RUE LEBLANC 25
75015 PARIS 15
France
Activity type: Research Organisations
Contatto amministrativo: Marie-Laure Page
Tel.: +33 4 38782796
Fax: +33 4 38785183
E-mail
STMICROELECTRONICS CROLLES 2 SAS
France

Contributo UE: EUR 202 401


RUE JEAN MONNET 850
38920 CROLLES
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Dominique Goubier
Tel.: +33 4 38 92 34 11
Fax: +00 0 000000 00 00
E-mail
PFEIFFER VACUUM
France

Contributo UE: EUR 132 224


98 AVENUE DE BROGNY
74000 ANNECY
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: JACQUES DE SAINT TRIVIER
Tel.: +33 4 50657949
Fax: +33 4 50465065
E-mail
ION BEAM SERVICES
France

Contributo UE: EUR 215 986


RUE GASTON IMBERT PROLONGEE
13790 ROUSSET
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Frank TORREGROSA
Tel.: +33 4 42 53 89 64
Fax: +33 4 42 53 89 59
E-mail
SOITEC SA
Partecipazione terminata
France

Contributo UE: EUR 0


CHEMIN DES FRANQUES - PARC TECHNOLOGIQUE DES FONTAINES
38190 BERNIN
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Robert Langer
Tel.: +33 4 76 92 95 88
Fax: +33 4 76 92 9761
E-mail
TOPPAN PHOTOMASKS FRANCE SAS
France

Contributo UE: EUR 85 437


ROUSSET PARC CLUB, AVENUE FRANCIS PERRIN 118
13106 ROUSSET
France
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: MICHEL TISSIER
Tel.: +33674648580
Fax: +3342290493
E-mail
SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG
Hungary

Contributo UE: EUR 93 250


PRIELLE KORNELIA UTCA 2
1117 BUDAPEST
Hungary
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Anita Farkasinszki
Tel.: +36 1 382 4530
Fax: +36 1 382 4532
E-mail
APPLIED MATERIALS ISRAEL LTD
Israel

Contributo UE: EUR 413 000


OPPENHEIMER STREET 9
76705 REHOVOT
Israel
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Yoram Uziel
Tel.: +97289499915
Fax: +97289486269
E-mail
KLA-TENCOR CORPORATION (ISRAEL)
Israel

Contributo UE: EUR 85 625


HATIKSHORET ST.
23100 MIGDAL HAEMEK
Israel
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Daniel Kandel
Tel.: +972 46449449
Fax: +972 46449450
E-mail
MEMC ELECTRONIC MATERIALS SPA
Italy

Contributo UE: EUR 22 500


VIALE GHERZI
28100 NOVARA
Italy
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Fabrizio Viker
Tel.: +390321334471
Fax: +390321691000
E-mail
Numonyx Italy Srl
Italy

Contributo UE: EUR 55 720


VIA CAMILLO OLIVETTI 2
20864 AGRATE BRIANZA
Italy
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: MANUELA SEMINARA
Tel.: +39 039 603 6669
Fax: +39 039 603 2777
E-mail
MAPPER LITHOGRAPHY B.V.
Netherlands

Contributo UE: EUR 81 675


COMPUTERLAAN 15
2628 XK DELFT
Netherlands
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Bert Jan Kampherbeek
Tel.: +31158880262
Fax: +31158880262
E-mail
Metryx Ltd
United Kingdom

Contributo UE: EUR 331 668


Unit 2 A, MANOR PARK, Nailsea Wall Lane
BS48 4DD Nailsea
United Kingdom
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Mark Berry
Tel.: +441275859988
Fax: +441275866112
E-mail
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK
United States

Contributo UE: EUR 0


STATE STREET 35
12201 ALBANY NY
United States
Activity type: Other
Contatto amministrativo: Michael Liehr
Tel.: +1 518 441 7816
Fax: +1 518 441 7816
E-mail
Intel Corporation
United States

Contributo UE: EUR 0


ORANGE STREET
19801 WILMINGTON NEW CASTLE DE
United States
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
Contatto amministrativo: Gilroy Vandentop
Tel.: +1 971 214 3331
Fax: +1 503 613 7997
E-mail