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MEMS IMU for long-term position stability and high precision rate monitoring

Objective

"Sensors for motion tracking are used in a broad variety of contexts: Image stabilisation in cameras, automotive applications like drive control or precise airbag deployment, and even for recording the movements of a person in sports, physiotherapy or cinematographic character animation. The sensing principle is the detection of acceleration and rotation rate by inertial forces that act on a suspended static or vibrating proof mass. To address low cost markets, micromachining technologies produce thousands of these sensor structures - so-called MEMS (Micro Electro-Mechanical Systems) - on a 200 mm silicon wafer.

An ""Inertial Measurement Unit"" (IMU) is formed through integration of electronic signal conditioning and sensor elements in a single device that is capable to measure motion in several degrees of freedom. The MILEPOST project targets to extend the accessible markets by a systematic improvement of the long-term stability of IMUs with respect to the electronics and MEMS design and process. The final project goal is to demonstrate a monolithic cluster for sensing threedimensional acceleration and angular velocity.

The participating three SMEs provide in-depth system design and integration experience on automotive inertial sensors (SensorDynamics, AT), a broad application background (Xsens, NL), and detailed knowledge about MEMS manufacturing (MEMS Foundry Itzehoe, DE). Their research partners are Fraunhofer Institute for Silicon Technology (DE) and Consorzio Pisa Ricerche (IT).
Considering the ever falling price per function in electronic products, the companies expect that they will not be able to compensate turnaround loss by higher productivity in their current activity fields. Systematic research along the whole value creation chain of complex integrated IMUs is therefore a vital need for the SMEs to gain new business opportunities."
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Coordinator

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Address

Hansastrasse 27c
80686 Munchen

Germany

Activity type

Research Organisations

EU Contribution

€ 88 443

Administrative Contact

Walter Krause (Mr.)

Participants (4)

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X-FAB MEMS Foundry Itzehoe GmbH

Germany

EU Contribution

€ 275 206

XSENS HOLDING B.V.

Netherlands

EU Contribution

€ 190 072

SENSORDYNAMICS AG ENTWICKLUNGS- UND PRODUKTIONSGESELLSCHAFT

Austria

EU Contribution

€ 495 115

CONSORZIO PISA RICERCHE SCARL

Italy

EU Contribution

€ 13 938

Project information

Grant agreement ID: 262118

Status

Grant agreement terminated

  • Start date

    1 January 2011

  • End date

    30 June 2013

Funded under:

FP7-SME

  • Overall budget:

    € 1 417 857

  • EU contribution

    € 1 062 774

Coordinated by:

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany