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Final Report - NAPA (Emerging Nanopatterning Methods)

Funded under: FP6-NMP


The growing importance of nanotechnology for the European Research Area (ERA) is reflected in the Sixth Framework Programme (FP6) Thematic Priorities. It is foreseen that most of the projects submitted to the Priority Area 3 (NMP) will need and develop nanopatterning techniques in one way or another. This project went a long way towards filling in this gap.

As outlined in their final report, strategically, the NAPA consortium complemented deep UV technology by providing low-cost scalable processes and tools to cover the needs of nanopatterning from CMOS back-end processes through photonics to biotechnology.

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