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Final Report - 3D-DEMO (Single step three-dimensional deposition of complex nanopatterned multifunctional oxide thin films)

Project ID: 33297
Funded under: FP6-NMP


This is the final report for the 3D-DEMO whose aim was to propose a new vision in oxide thin film deposition, namely the development of a new thin film deposition technique, the so-called Chemical beam epitaxy (CBE), in order to achieve three-dimensional (3D) patterning of thin film properties in a single step as well as the characterisation of the alkali niobate family compounds by combinatorial deposition which constitute lead-free materials for innovative piezoelectric and electro-optic applications.

The report covers the plans and objectives of the project, then it consists of four sections in which the following are stated correspondingly: the hardware for the CBE method and the Near-field scanning optical microscopy (NSOM), the results of the CBE as well as of the Pulsed laser deposition (PLD) methods, characterisation and devices processing and finally the conclusions.

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