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Nano-structured solid-state gas sensors with superior performances (NANOS4) - Publishable Executive Summary

Project ID: 1528
Funded under: FP6-NMP


In the frame of NANOS4 solid state Metal Oxide (MOX) sensors selective and stable have been prepared by considering top-down and self-assembled bottom-up approaches:
1. Single crystal and stable nanobelts of In2O3, SnO2 and ZnO have deposited by vapor phase transport process via catalyzed epitaxial crystal growth over pre-seeded substrates (self-assembled bottom-up). Innovative methods for selective patterning and removal of NWs allowing direct integration into devices have been developed. The devices have been transferred over micromachined hotplates heater substrates based on silicon-on-insulator (SOI). Beside, to overcome the contacting difficulties, the feasibility of producing optical based sensors has been demonstrated.
2. MOX thin films have been prepared patterned by optical and FIB nanolithography to produce devices as nanowires and nanodots (top-down).
3. ZnO, SnO2, TiO2, In2O3 nanocrystals and nanopowders have been prepared as colloids and by hot injection techniques
4. Other bottom up techniques have been explored as electron beam evaporation and hydrothermal and electrochemical synthesis Materials development has been supported by a wide range of morphological and physico-chemical characterisation techniques like HRTEM and Raman. Beside theoretical aspects of gas-surface interactions and electrical models has been developed.
The newly developed technologies have been benchmarked towards more state-of-the art technologies and established commercial products. A few among state-of-the-art benchmarking materials have been optimized and kept inside the final arrays.
Gas sensor arrays were embedded into tiny micro reactor systems and operated by micro-pumps in an active sampling mode. A portable micro reactor sensor array has been developed, which proves to be a promising device and is expected to qualify for commercial applications after further development.

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