Community Research and Development Information Service - CORDIS


MEMS MATURITY — Result In Brief

Project ID: 323458
Funded under: FP7-JTI
Country: France

Advances in gyroscopes

An EU-funded initiative has improved the current manufacturing process and design of tiny mechanical gyroscopes less than 1 mm in size.
Advances in gyroscopes
Microelectromechanical systems (MEMS) gyroscopes are tiny, cheap devices that measure angular velocity. These gyroscopes are used in various applications such as smartphones and automobiles to detect movement of the device.

The MEMS MATURITY (MEMS Gyro - Maturity assessment of performance and integration) initiative has improved the functionality and cost effectiveness of the MEMS gyroscope.

Scientists have reduced the cost of the gyro cell by decreasing the size of the silicon die that contains the cell. Further, improving how the device is attached has improved the performance by reducing residual stress on the gyroscope.

The team also improved the getter (the chemical sponge that is used to maintain the vacuum). They simplified the manufacturing process, and reduced contamination risk. In addition, improving the attachment process led to better alignment and attachment quality.

MEMS MATURITY advanced the manufacturing and design of MEMS gyroscopes. These advances may improve a wide range of devices such as systems to prevent vehicles rolling and improve flight navigation in aircraft.

Related information


Gyroscopes, manufacturing, microelectromechanical systems, MEMS, angular velocity
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