Community Research and Development Information Service - CORDIS

Low temperature deposition of wear and corrosion resistant layers by vacuum assisted processes

2 compounds were chosen for their potential possibilities as wear and corrosion resistant layers. Boron deposited from diborane at a deposition temperature of 400 C exhibits a high hardness (>2000 kg/mm{2}, HK at 50 gF). The adhesion of the boron layer of M2 steel substrate can be significantly enhanced by the application of a thin aluminium intermediate layer. The thickness of this layer has to exceed about 100 nm, related to the pinhole density of the thin film. Iron from the substrate which diffuses through the pinholes of the aluminium is thought to be responsible for the adhesion problem.

Titanium dioxide films deposited from titanium isopropoxide on M2 steel substrates at a temperature of 400 C show an extremely low adhesion to these substrates. Some improvement is obtained from special heat treatments such as RTA at 1000 C or in situ heat treatment at 750 C. Thin intermediate such as titanium or aluminium can give some improvement in adhesion. Corrosion tests indicate that the film structure, depending on the experimental conditions, is an important feature for the application of these films.

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