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157nm laser processing know-how

This result incorporates the basic process knowledge, necessary for micro machining difficult materials such as fused silica, silicon or fluorinated polymers. These materials can not be precision machined with longer wavelength, the high transmission in the UV wavelength range leads to an energy dissipation into the material and thus temperature gradients, which cause thermal induced cracking.

Some fluorinated polymers show high binding energies, which cannot be crack with UV or deep UV wavelength. Here the high photon energy of 7,9 eV is used for direct bond braking and thus for ablation.

For these processes, the basic process technology has been developed; micro-machining tools are available for feasibility studies and deeper process understanding. The processing strategies are at hand and the basic results like ablation rate and achievable surface quality are available.

Reported by

Laser Zentrum Hannover
Hollerithallee 8
30419 Hannover
Germany
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