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HFETs structure on sapphire or 4H-SiC SI

Lumilog also grew HFETs structures on sapphire and 4H-SiC (SI) and obtained a very good homogeneity of the characteristics on the whole wafer and from wafer to wafer in the same run.

Reported by

Lumilog
2720, chemin de Saint Bernard, Les Moulins I
06220 Vallauris
France
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