Community Research and Development Information Service - CORDIS

Low dislocation density GaN/sapphire template (NID, n-type and semi-insulating), TDs~upper107cm{-2}

Low dislocation density GaN/sapphire templates with TDs density in the upper 107cm{-2} have been obtained improving the proprietary Si/N treatment of the sapphire substrate prior to the deposition of the low temperature buffer layer. These are pseudosubstrates to be used for the growth of nitride based device structure, like UV LEDs or FETs. These templates are also used as pseudosubstrates in MBE. One of our customers, Sharp UK, demonstrated the first MQWs GaInN/GaN laser diodes grown by MBE on Lumilog’s GaN/sapphire templates.

Reported by

Lumilog
2720, chemin de Saint Bernard, Les Moulins I
06220 Vallauris
France
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