Forschungs- & Entwicklungsinformationsdienst der Gemeinschaft - CORDIS

Technology and production of two kinds of ISFET sensors: BSC (Back-Side-Contact) and FSC (Front-Side-Contact)

New structures of miniaturized solid-state potentiometric transducers i.e. back-side contact (BSC) and front-side contact (FSC) ion-sensitive field effect transistors (ISFETs) were manufactured by the Institute of Electron Technology+PW (Poland) and LAAS-CNRS (France)+ Microsens (Switzerland), respectively. The performed tests proved good performance and excellent linearity of the pH responses of the ISFETS, which enables the accurate determination of pH.

Further deposition of the polyHEMA layer on the gate surface and the chemical modification of the ISFETs i.e. the deposition of ion-selective polymer membranes allowed obtaining sensors - CHEMFETs - sensitive to target ions (NH4+, K+, Na+, NO3-). The procedure of the polyHEMA layer deposition is compatible with the IC technology and is realized using spin-coating technique (industrial method) in the Institute of Electron Technology. Two types of ion-selective membranes (of optimised composition) based on plasticized poly(vinyl chloride) (PVC) and polysiloxane derivative were applied.

The method of membrane deposition using an automated dispensing unit (semi-industrial method, PW) and the technology of UV-polymerizable membrane deposition on ISFET wafer using spin-coating set-up (industrial method, LAAS-CNRS and Microsens) were developed, enabling the production of cheap sensors sensitive to: NH4+, K+, Na+ and NO3- ions. Ca+2-sensitive FSC-CHEMFETs have been also prepared by Microsens using the spin-coating industrial technology (these sensors are not yet implemented in the prototype). The working range of the CHEMFETs (linear range of the calibration curves at least 1-4 pX) is appropriate to perform ion monitoring in environmental analysis.

An examplary prototype of a portable multisensor analyzer for water quality monitoring based on BSC-CHEMFETs was fabricated by Systea (Italy). Also ion-sensitive FSC-CHEMFETs are ready to be implemented in the measuring system. The multisensor analyzer will be dedicated to the environmental pollution survey of wastewater and natural water resources.

More information on the Sewing project can be found at:

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Warsaw University of Technology
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