Servicio de Información Comunitario sobre Investigación y Desarrollo - CORDIS

Methodology for assessing 3D FeCAPs

A methodology for electrical characterization of 3D FeCaps has been developed. By looking at capacitors with different perimeter/area ratio and different layout options it is possible (with a set of dedicated electrical and structural measurements) to tell the contribution from the planar part and that from the sidewalls. This feature is more and more important as the FeCap dimensions shrink, and they must rely more and more on the contribution from the non-planar section to the total capacitance.

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Université de Toulon - Var
83957 La Garde
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