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PIRAMID Report Summary

Project ID: G5RD-CT-2001-00456
Funded under: FP5-GROWTH
Country: France

Electro-acoustic properties of a thick film in a multilayer structure

A model has been developed and implemented, with a friendly graphic interface (using matlab) and a fitting method to measure all the parameters corresponding to the thickness mode (ie: thickness coupling factor, longitudinal wave velocity, relative dielectric constant at constant strain, mechanical and dielectric losses) of a single piezoelectric layer included in a multilayer structure.

The model is based on an equivalent electrical circuit (K.L.M.) and its result is fitted to the characterisation of piezoelectric thick film made by screen printing on a substrate.

This structure is generally composed of four layers (substrate, bottom electrode, piezoelectric thick film and top electrode). If the acoustic properties of the inert layers are known, the unknown parameters of the thick film are deduced.

Reported by

GIP Ultrasons
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