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Fabrication of microneedle electrodes for use in electroporation

NMRC Ireland (now known as Tyndall National Institute) has developed processes for optimising the fabrication of silicon microneedle arrays using both etch and dry etch technologies in the ENDOPORATOR project, these have been used as electroporation electrodes, but as the needles may also be hollow then they can be used for delivery of drugs or other therapeutic agents to tissue. NMRC has fabricated silicon needles up to and over 300 microns in height, with complete control over the needle height, shape, surface smoothness, needle quality, and reproducibility across a wafer or batch of wafers.

Reported by

National Microelectronics Research Centre (NMRC)
Tyndall National Institute
Cork
Ireland
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