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Piezoceramic miniature motors

A 10x10x0.5mm piezoelectric actuator, a motor, which has bimorphs performing a walking motion have been developed. By using multilayer technology low drive voltages, easily delivered by integrated circuits, are possible. The monolithic approach results in a thin robust structure without need for complex assembly. Depending on how the bimorphs are arranged rotational or linear motion with nanometre precision and mm/s speeds can be generated. First prototypes have been used for the MiCRoN robot.

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