Forschungs- & Entwicklungsinformationsdienst der Gemeinschaft - CORDIS

Miniaturized piezo-motor

The piezo motor was designed considering that the FPA is linearly scanned. The motor developed is very small with dimensions 7x2x1 mm. The mount for the motor is a novel flexure approach. The mount enables better transfer of mechanical power and relaxes the straightness requirements of the stage. The dynamic performance of the motor is good as well as the precision control one. The piezo-motor requires a position feedback for the close servo loop. The type of sensor adopted is a rotary one, which has the advantage to achieve higher encoder resolution

Reported by

NANOMOTION
Mordot Hacarmel Industrial Park
20692 YOKNEAM
Israel
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