Wspólnotowy Serwis Informacyjny Badan i Rozwoju - CORDIS

High throughput reactor for up to 0,5 square meter LPE layers per run

In principle a vertical batch apparatus can be scaled up to 300 wafers (125mmx125mm), which are dipped into a solvent filling up a crucible of 1m height. As much as 10 such vertical systems could be placed next to each other into a furnace of two square meter in size.

We give one example under the following assumptions:
10 x 300Wafers / run with a circle time of 6 hours per run including loading and melt back would result in 8 layers / minute or 6 MW / year respectively. The cost per layer is then calculated to be less than 10 US cent. The energy consumed would be 20Wh / layer, which corresponds to an energy payback time of two or three days.

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Department of Physics
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