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3RD GENLAC Résumé de rapport

Project ID: ENK6-CT-2002-00678
Financé au titre de: FP5-EESD
Pays: Germany

Soldering technique for long tube targets

This result is especially related to the development of long rotatable ceramic zinc aluminom oxide (ZAO) targets, however it can be applied for the bonding of alternative ceramic target materials as well.

Ceramic ZAO target material is fabriated as zylindrical segments which are bonded onto a cylindrical backing tube by metallic soldering. The main problem of this method is that cracks and delamination occurs due to non-matching thermal expansion coefficients.

Thus a refined method of solidering ceramic ZAO target segments onto a cylindrical backing tubes has been developed and protected by a European patent application.

Reported by

W.C. Heraeus GmbH
Wilhelm-Rohn-Strasse 25
63450 Hanau
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