Forschungs- & Entwicklungsinformationsdienst der Gemeinschaft - CORDIS

AFM characterization of cantilever-driver transducers

An atomic force microscope (AFM) is used as a nanometer-scale resolution tool for the characterization of the electromechanical behaviour of a resonant sub-micron cantilever. The cantilever is actuated electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. In order to minimize the interaction between AFM probe and the resonating transducer cantilever, the AFM is operated in a dynamic non-contact mode, using oscillation amplitudes corresponding to a low force regime. The dependence of the static cantilever deflection on DC voltage and of the oscillation amplitude on the frequency of the AC voltage is measured by this technique and the results are fitted by a simple non-linear electromechanical model. The method is found to be simple to use and non-destructive, and it allows to determine the frequency response of the cantilever with nanometer scale spatial resolution. The method can be applied to any movable mechanical micro/nano structure.

Reported by

Centro Nacional de Microelectrónica
Campus UAB
08193 Bellaterra (Barcelona)
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