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Functional evaluation: Results

Fully integrated cantilever systems have been characterized using the assembled measurement set-up as described in section 2.1 (# 14).

The vacuum operation shows that the fabricated cantilever systems work accordingly to the intentions of the project. The quality factor of cantilevers at 0,4 mbar was found to be roughly 5000, which is high considering that the structural layer is poly-silicon. The resonance frequency was 1.5 MHz.

The stability of cantilever mass sensors has been determined in air and vacuum operation and a minimal mass sensitivity of the order of attogram has been demonstrated.

During the achievement of these results a broad know-how has been gained on how to electrically connect and package MEMS/NEMS devices. This vital know-how will be used in future projects on MEMS/NEMS.

Reported by

MIKROELEKTRONIK CENTRET
TECHNICAL UNIVERSITY OF DENMARK, BUILDING 345 EAST
2800 Lyngby
Denmark
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