Forschungs- & Entwicklungsinformationsdienst der Gemeinschaft - CORDIS

PECVD deposition process from TEOS/O2/Ar mixtures for corrosion protection of Mg

A process for depositing a compact SiOx thin film to coat metallic and polymeric surface for different application such as protection from corrosion of metals, protection from tarnish of silver containing surfaces, gas and liquid barrier, etc. has been obtained utilizing RF plasma fed with tetraethoxysilane, oxygen and Ar mixtures.

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Dipartimento di Chimica Università di Bari
Via Orabona, 4
70126 Bari
Italy
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