Forschungs- & Entwicklungsinformationsdienst der Gemeinschaft - CORDIS

Method for sampling and analysis of exhaust gas

In order to characterize the chemical composition of the exhaust gas of a plasma process performed in organosilicon plasmas within the project it has been studied and optimized a sampling and analysis procedure, which allow the identification and quantification of unreacted monomer as well as of plasma by-products. Sampling is performed with a LN2 cold trap, while the analysis is performed by means of Gas Chromatography with mass spectrometric detection.

Reported by

Dipartimento di Chimica Università di Bari
Via Orabona, 4
70126 Bari
Italy
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