Wspólnotowy Serwis Informacyjny Badan i Rozwoju - CORDIS


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Project ID: ENK6-CT-2001-00561
Źródło dofinansowania: FP5-EESD
Kraj: Belgium

Process sequence for an improved integrated classical screen printing process

One of IMEC’s tasks in the project is the optimisation of what is known as the classical screen printing process for thin (200 micron or less) multicrystalline silicon solar cells. This process incorporates a limited number of steps: isotropic texturisation, shallow emitter diffusion, parasitic junction removal, dielectric ARC and passivation and finally screen printed metallisation. These process steps have been optimized first on an individual level.

Afterwards each process step was looked at carefully to allow use in an integrated process sequence. Care has been taken to allow application on thin wafers: this is mostly evident on the steps related to isotropic texturisation (to avoid development of dislocations) and screen printing of the rear contact (to avoid bending of the wafers). For the latter, the applied material (Al-paste) as well as the printing parameters are important. Further work has been done to increase the blue response of the cells by optimisation of the POCl3-diffusion and the front metallisation.

Application of the process has resulted in efficiencies around 16% on 200 micron thick multicrystalline silicon solar cells (size:100 cm2).

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