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Prototyping in the Micro and Nano Scale 2006

Final Activity Report Summary - PROMINAS - 06 (Prototyping in the Micro and Nano Scale 2006)

In the framework of PROMINAS project, a series of 6 short hands-on training courses (TCs) (summer courses) were performed. The list of TCs if: TC-1: Basic Microelectronic processing; TC-2: Organic electronics - tiny molecules for macro-electronics; TC-3: e-beam based tools for device/materials characterisation (FIB-TEM); TC-4: Growth and structural characterisation of semiconductor nanostructures (MBE); TC-5: Single electron transistors, Photonic Crystals and nano-tools; TC-6: Electrical and optical characterisation of nanodevices. The courses were followed by a 2.5 day workshop (WS) (conference type) on "The convergence of Microelectronics and Nanotechnology".

The workshop was of a tutorial spirit, with emphasis on integration of novel technologies. The series of courses were conducted in the Microelectronics and Nanoelectronics Research Centers, the Technion, Israel, housing the Micro-Nano-Fabrication-Unit (MNFU) (TC-1, TC-2, and TC-3) the Institute of Photonics and Nanotechnology (IFN-CNR) in Rome, Italy (TC-5 and TC-6), and at Departement de Recherche sur la Matiere Condensee, CEA Grenoble, France (TC-4). The workshop was held in MINATEC, Grenoble, France. The series of events was offered mainly to researchers and engineers early in their career development, with some previous exposure to semiconductors and semiconductor devices. Some of the participants came from the "conventional microelectronics" environment, but lacking knowledge on III-V opto-electronic devices, or nanoelectronics, others had knowledge in III-V materials and devices, without previous exposure to Silicon fabs, others came from a nanotechnology culture, with some experience in the "bottom-up approach", and willing to consider how to incorporate the novel materials or methods to the fab of the future.

The series of events, covering the "conventional" approach and extending into the various interdisciplinary aspects of nanotechnologies illuminated the need for integration of the procedures, and thus lead to a significant step towards a future nanoelectronic fab in Europe. Since it is not possible to cover in this activity all aspects of "micro-nano" novel technologies, we expect this series of events to become a paradigm for future continued training in other places, pursued by similar initiatives.

The courses were held during the summer (July-August), during 3 consecutive years (two courses each year). Each course was of two weeks duration (10 learning days). Frontal daily lectures during 3-4 morning hours provided the theoretical and technological background, and were followed by afternoon hours of laboratory "hands-on" training, conducted either in a clean room facility, or in one of the nano-characterisation laboratories. Trainees (event participants) were provided with full board accommodation, and all needed learning aids and/or processing tools. The number of participants in each course was limited to 12 people (In one case, a last minute cancellation resulted in a total of 11 participants). Some participants attended more than one TC. A total of 63 people attended the courses over the 3 year period.

After completion of the 6 courses, all event participants were invited to the closing workshop (Conference event) devoted to the theme: The convergence of conventional microelectronics and nanotechnology. The workshop was held in Grenoble. Attendance was expected to be of most trainees of the courses in the series (63 participants), but only 35 were able to attend. In addition, 30 individuals registered to the workshop.

Thus, the workshop attendance was of 65 researchers. Special attention was paid to the combination various technologies, highlighting multidisciplinarity. The long term goal was to establish a community of young researchers, knowing each other, engaged in closing the gap between micro and nano. The chairman of the workshop was Prof. Uri Sivan, Head of the Russell Berry Nanotechnology Institute at the Technion.