Towards Cost-Efficient Flexible Heterogeneous Integration for Micro- and Nanosystem Fabrication

Project Information

XMEMS

Grant agreement ID: 267528

Project closed

Start date 1 March 2011

End date 29 February 2016

Funded under

• Specific programme: "Ideas" implementing the Seventh Framework Programme of the European Community for research, technological development and demonstration activities (2007 to 2013)

Total cost € 2 279 800,00

EU contribution € 2 279 800,00

Coordinated by

KUNGLIGA TEKNISKA HOEGSKOLAN
Sweden