Microelectromechanical Systems from Nanocrystalline Diamond

Projektinformationen

DIAMEMS

ID Finanzhilfevereinbarung: 300883

Abgeschlossenes Projekt

Startdatum 1 April 2012

Enddatum 31 März 2014

Finanziert unter

• Specific programme "People" implementing the Seventh Framework Programme of the European Community for research, technological development and demonstration activities (2007 to 2013)

Gesamtkosten € 270 145,80

EU-Beitrag € 270 145,80

Koordiniert durch

CARDIFF UNIVERSITY
United Kingdom

Ziel

"This project aims to develop high frequency, high quality factor micro and nano – electromechanical systems (MEMS) from nanocrystalline diamond (NCD). NCD offers superior performance to silicon for MEMS due to its extreme Young’s modulus, but it is also compatible with silicon CMOS technologies, offering a key advantage over other potential MEMS materials. High performance NCD growth and planarization will be optimised for MEMS applications. The realisation of continuous, smooth (<1nm rms over 1µm), pin hole free NCD over large areas exhibiting bulk diamond properties will enable a multitude of applications at drastically reduced cost to currently available bulk diamond technologies. The resulting material will have applications outside the MEMS field such as in tribology, optical coatings, electrochemical electrodes (when doped with boron), heat spreading etc. The development of clean room processing technologies of NCD will allow the fabrication of new devices and result in new ideas exploiting this novel material."

Wissenschaftliches Gebiet

• engineering and technology › materials engineering › coating and films
• natural sciences › chemical sciences › inorganic chemistry › metalloids
• engineering and technology › mechanical engineering › tribology

Programm/Programme

• FP7-PEOPLE - Specific programme "People" implementing the Seventh Framework Programme of the European Community for research, technological development and demonstration activities (2007 to 2013)

Thema/Themen

• FP7-PEOPLE-2011-IEF - Marie-Curie Action: "Intra-European fellowships for career development"

Aufforderung zur Vorschlagseinreichung

FP7-PEOPLE-2011-IEF
Andere Projekte für diesen Aufruf anzeigen

Finanzierungsplan

MC-IEF - Intra-European Fellowships (IEF)

Koordinator

CARDIFF UNIVERSITY

Kontakt Verwaltung

Eevi Laukkanen (Ms.)

• EU-Beitrag: € 270 145,80
• Adresse: NEWPORT ROAD 30 36 ; CF24 0DE Cardiff ; Vereinigtes Königreich
• Region: Wales › East Wales › Cardiff and Vale of Glamorgan
• Aktivitätstyp: Higher or Secondary Education Establishments
• Gesamtkosten: Keine Daten