Cel For many of the processing steps in the manufacture of thin film microelectronic devices, plasma is the only way to generate the required active chemical species. In the processing of ultra-thin layers with steady-state plasma there are problems associated with charging and breakdown of dielectric layers. Pulsed plasmas offer a way to overcome these problems, but new methods are required for the monitoring and control of such plasmas. The aim of this proposal is to develop and test the new diagnostic instrumentation required for pulsed plasma processing. Time-resolving Langmuir probes and optical spectrometry will be developed to diagnose the plasma, and optical reflectrometry will be used to monitor the film growth. The test bed for the validation of these new techniques will be a pulsed laser deposition facility for the manufacture of SQUID magnetometers. However, this new instrumentation will find application in a wide variety of pulsed plasma processes. Dziedzina nauki engineering and technologymaterials engineeringcoating and filmsnatural sciencesphysical sciencesopticslaser physicspulsed lasers Program(-y) FP5-GROWTH - Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002" Temat(-y) 1.1.3.-6. - RTD Activities of a Generic Nature : Measurements and Testing Zaproszenie do składania wniosków Data not available System finansowania CSC - Cost-sharing contracts Koordynator RISOE NATIONAL LABORATORY Wkład UE Brak danych Adres 399,Frederiksborgvej 399 4000 ROSKILDE Dania Zobacz na mapie Koszt całkowity Brak danych Uczestnicy (4) Sortuj alfabetycznie Sortuj według wkładu UE Rozwiń wszystko Zwiń wszystko INTELLEMETRICS LTD Zjednoczone Królestwo Wkład UE Brak danych Adres 35 CABLE DEPOT ROAD FK15 0DE FALKIRK,LAURIESTON Zobacz na mapie Koszt całkowity Brak danych SCIENTIFIC SYSTEMS LIMITED Irlandia Wkład UE Brak danych Adres Unit 3, Howth Junction Business Park, Kilbarrack DUBLIN 5 Zobacz na mapie Koszt całkowity Brak danych THALES S.A. Francja Wkład UE Brak danych Adres Domaine de Corbeville 91404 ORSAY Zobacz na mapie Koszt całkowity Brak danych THE PROVOST, FELLOWS AND SCHOLARS OF THE COLLEGE OF THE HOLY AND UNDIVIDED TRINITY OF QUEEN ELIZABETH NEAR DUBLIN HEREINAFTER TRINITY COLLEGE DUBLIN Irlandia Wkład UE Brak danych Adres Trinity College Dublin, College Green 2 DUBLIN Zobacz na mapie Koszt całkowity Brak danych
