Objective
"This project aims to develop high frequency, high quality factor micro and nano – electromechanical systems (MEMS) from nanocrystalline diamond (NCD). NCD offers superior performance to silicon for MEMS due to its extreme Young’s modulus, but it is also compatible with silicon CMOS technologies, offering a key advantage over other potential MEMS materials. High performance NCD growth and planarization will be optimised for MEMS applications. The realisation of continuous, smooth (<1nm rms over 1µm), pin hole free NCD over large areas exhibiting bulk diamond properties will enable a multitude of applications at drastically reduced cost to currently available bulk diamond technologies. The resulting material will have applications outside the MEMS field such as in tribology, optical coatings, electrochemical electrodes (when doped with boron), heat spreading etc. The development of clean room processing technologies of NCD will allow the fabrication of new devices and result in new ideas exploiting this novel material."
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
- engineering and technology materials engineering coating and films
- natural sciences chemical sciences inorganic chemistry metalloids
- engineering and technology mechanical engineering tribology
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
FP7-PEOPLE-2011-IEF
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
CF10 3AT CARDIFF
United Kingdom
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.