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Content archived on 2024-06-18

Surface Physics for Advanced Manufacturing

Objective

Today, markets demand smaller, cheaper, energy friendly and more different consumer products. Last decades micro technology has opened possibilities for mobile communication, safety and health science products. To meet these demands, the industry is encountering technological barriers that prevent the industry from evolving from the micro to a nanotechnology era. To resolve these barriers, the industry and research institutes need to initiate research programmes, and need to structure and integrate its research programmes and transfer the knowledge that as been acquired in these programmes. “New” researchers have to be trained with excellent research skills, knowledge on the specific technology, and understanding of market demands, application development, and so on. For this purpose 4 industrial, 5 academic and 3 research institutes have defined the 4 year SPAM research and training program; “a Supra-disciplinary approach to research and training in surface Physics for Advanced Manufacturing - SPAM”. Research objectives are: • identify and develop crucial knowledge in the field of surface physics, • enable the manufacturing of smaller semi-conductors and hence technology to print under 32 nm; extreme positional accuracy (< 4 nm); at competitive cost, • use this knowledge to further develop lithography technologies/tools needed for cost efficient development of nano-electronic devices, including manufacturing processes. Training objectives are: • provide personalised individual training, in particular for 16 ESR but also for 6 ER, to prepare and optimise their research in SRTs, with the help of 9 VS. • provide a network-wide training, fully exploiting the network potential and complementarities, leading to 12 network events. • transfer existing knowledge between partners through the SRTs and to transfer newly gained knowledge. Meeting the objectives are the responsibility of 4 Supra-disciplinary Research Teams (SRT) and 5 interlinking Training Exchange Pools.

Fields of science (EuroSciVoc)

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Keywords

Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)

Topic(s)

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Call for proposal

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FP7-PEOPLE-2007-1-1-ITN
See other projects for this call

Funding Scheme

Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.

MC-ITN - Networks for Initial Training (ITN)

Coordinator

ASML NETHERLANDS B.V.
EU contribution
€ 320 096,93
Address
DE RUN 6501
5504DR Veldhoven
Netherlands

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Region
Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

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Participants (11)

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