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Surface Physics for Advanced Manufacturing

Objective

Today, markets demand smaller, cheaper, energy friendly and more different consumer products. Last decades micro technology has opened possibilities for mobile communication, safety and health science products. To meet these demands, the industry is encountering technological barriers that prevent the industry from evolving from the micro to a nanotechnology era. To resolve these barriers, the industry and research institutes need to initiate research programmes, and need to structure and integrate its research programmes and transfer the knowledge that as been acquired in these programmes. “New” researchers have to be trained with excellent research skills, knowledge on the specific technology, and understanding of market demands, application development, and so on. For this purpose 4 industrial, 5 academic and 3 research institutes have defined the 4 year SPAM research and training program; “a Supra-disciplinary approach to research and training in surface Physics for Advanced Manufacturing - SPAM”. Research objectives are: • identify and develop crucial knowledge in the field of surface physics, • enable the manufacturing of smaller semi-conductors and hence technology to print under 32 nm; extreme positional accuracy (< 4 nm); at competitive cost, • use this knowledge to further develop lithography technologies/tools needed for cost efficient development of nano-electronic devices, including manufacturing processes. Training objectives are: • provide personalised individual training, in particular for 16 ESR but also for 6 ER, to prepare and optimise their research in SRTs, with the help of 9 VS. • provide a network-wide training, fully exploiting the network potential and complementarities, leading to 12 network events. • transfer existing knowledge between partners through the SRTs and to transfer newly gained knowledge. Meeting the objectives are the responsibility of 4 Supra-disciplinary Research Teams (SRT) and 5 interlinking Training Exchange Pools.

Field of science

  • /social sciences/economics and business/business and management/commerce
  • /engineering and technology/nanotechnology

Call for proposal

FP7-PEOPLE-2007-1-1-ITN
See other projects for this call

Funding Scheme

MC-ITN - Networks for Initial Training (ITN)

Coordinator

ASML NETHERLANDS B.V.
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 320 096,93
Administrative Contact
Gerold Alberga (Dr.)

Participants (11)

PFEIFFER VACUUM
France
EU contribution
€ 435 287,55
Address
98 Avenue De Brogny
74000 Annecy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Jacques De Saint Trivier (Mr.)
CARL ZEISS SMT AG
Germany
EU contribution
€ 391 611,44
Address
Carl-zeiss-strasse 22
D-73447 Oberkochen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Tilmann Heil (Dr.)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 601 447
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
Administrative Contact
Christine Van Houtven (Ms.)
"NATIONAL CENTER FOR SCIENTIFIC RESEARCH ""DEMOKRITOS"""
Greece
EU contribution
€ 506 277,13
Address
End Of Patriarchou Grigoriou E And 27 Neapoleos Street
15341 Agia Paraskevi
Activity type
Research Organisations
Administrative Contact
Stella Martaki (Ms.)
UNIVERSITAET STUTTGART
Germany
EU contribution
€ 217 241,25
Address
Keplerstrasse 7
70174 Stuttgart
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Katja Costantino (Ms.)
LAVISION GMBH
Germany
EU contribution
€ 205 824,35
Address
Anna Vandenhoeck Ring 19
37081 Goettingen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Norbert Voigt (Mr.)
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
EU contribution
€ 205 384,14
Address
Anna Van Buerenplein 1
2595 DA Den Haag
Activity type
Research Organisations
Administrative Contact
Ton Bastein (Dr.)
TECHNISCHE UNIVERSITEIT DELFT
Netherlands
EU contribution
€ 368 156,19
Address
Stevinweg 1
2628 CN Delft
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Hendrik Paul Urbach (Prof.)
WAGENINGEN UNIVERSITY
Netherlands
EU contribution
€ 410 768,30
Address
Droevendaalsesteeg 4
6708 PB Wageningen
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Jos Teunissen (Mr.)
JULIUS-MAXIMILIANS-UNIVERSITAT WURZBURG
Germany
EU contribution
€ 227 834,24
Address
Sanderring 2
97070 Wuerzburg
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Christian Gloggengiesser (Mr.)
UNIVERSITEIT TWENTE
Netherlands
EU contribution
€ 410 768,30
Address
Drienerlolaan 5
7522 NB Enschede
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Andries Groenink (Mr.)