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Automated in-line Metrology for Nanoscale Production

Objetivo

Knowing the mechanical properties of workpieces and machine-tools also at the nanometer scale is an absolute necessity for an efficient nanoscale production. Current technologies are lacking the flexibility and robustness needed for measuring such key parameters as topography, morphology, roughness, adhesion, or micro- and nano-hardness directly in a production environment. This hinders rapid development cycles and resource efficient process and quality control. The following technology and methodology gaps for addressing these challenges were identified: Efficient disturbance rejection and systems stability; robustness and longevity of probes; short time to data (i.e. high-speed measurements and data handling); and traceability of the measurement.
The project aim4np strives at solving this problem by combining measuring techniques developed in nanoscience with novel control techniques from mechatronics and procedures from traceable metrology.

Goal and Deliverable
The main deliverable will be a fast robotic metrology platform and operational procedures for measuring with nanometer resolution and in a traceable way the topography, morphology, roughness, micro- and nano-hardness, and adhesive properties of large samples in a production environment.

Convocatoria de propuestas

FP7-NMP-2012-SME-6
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Coordinador

TECHNISCHE UNIVERSITEIT DELFT
Aportación de la UE
€ 601 813,65
Dirección
STEVINWEG 1
2628 CN Delft
Países Bajos

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Región
West-Nederland Zuid-Holland Delft en Westland
Tipo de actividad
Higher or Secondary Education Establishments
Contacto administrativo
Karin De Wolde (Mrs.)
Enlaces
Coste total
Sin datos

Participantes (13)