Community Research and Development Information Service - CORDIS

FP6

NANOPLASMA

Project ID: 16424
Funded under

Plasma Etching for desired nano-Feature shape and nano-texture: An Advanced Reactor and Simulation Software for Feedback-Loop Plasma Control

From 2006-04-01 to 2009-03-31

Project details

Total cost:

EUR 2 478 000

EU contribution:

EUR 1 580 000

Coordinated in:

United Kingdom

Call for proposal:

FP6-2004-IST-NMP-2See other projects for this call

Funding scheme:

STREP - Specific Targeted Research Project

Objective

Coordinator

OXFORD INSTRUMENTS PLASMA TECHNOLOGY LTD
United Kingdom
Old Station Way, Eynsham
WITNEY OXFORDSHIRE
United Kingdom
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Administrative contact: Mike COOKE
Tel.: +44-1934837000
Fax: +44-1934837001
E-mail

Participants

TECHNISCHE UNIVERSITAET ILMENAU
Germany
Max-Planck-Ring 14
100565 ILMENAU
Germany
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Administrative contact: Ivo RANGELOW
Tel.: +49-3677693718
Fax: +49-3677693132
E-mail
DUBLIN CITY UNIVERSITY
Ireland
Glasvenin
DUBLIN
Ireland
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Administrative contact: Stephen DANIELS
Tel.: +353-017007639
Fax: +353-018360830
E-mail
NATIONAL CENTER FOR SCIENTIFIC RESEARCH "DEMOKRITOS"
Greece
Terma (End of Street) Patriarchou Gregoriou Str.
P.O. Box 60228 AGHIA PARASKEVI
Greece
Administrative contact: Evangelos GOGOLIDES
Tel.: +30-2106503237
Fax: +30-2106511723
E-mail
S3SOLUTIONS GMBH
Germany
Sollachweg 9
WESSLING
Germany
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Administrative contact: Alexander PETRASCHENKO
Tel.: +49-1739072588
Fax: +49-81539089879
E-mail
ISMA LTD
Bulgaria
Samokovsko Shosse 2
SOFIA
Bulgaria
Administrative contact: Peter STEFANOV
Tel.: +359-29790478
Fax: +359-29753017
E-mail
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