Objective
We propose a step change in the way plasma etching processes are controlled, through understanding, measuring and controlling the key parameters determining the environment experienced by a processed substrate. We will use simulation, experiments and innovative plasma processing concepts to demonstrate robust PLASMA ETCHING OF NANO-SCALE FEATURES as well as CONTROLLED SURFACE NANO-ROUGHNESS and texture. We will use a multi-level nested approach for the understanding and optimisation of plasma processing for nanotechnology: The first level is the plasma tool and the gas phase plasma state, the second level is the surface and the features being etched, while the third level is the nano-texture and nano-roughness of the surfaces and features etched. A feedback loop will be developed to optimise simultaneously all levels of the nano-scale etching This will greatly improve the ability, especially of SMEs, to achieve reliable fabrication of nano-devices in small batch development, and in the scale-up to larger production quantities.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- engineering and technology electrical engineering, electronic engineering, information engineering information engineering telecommunications radio technology radio frequency
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering control systems
- engineering and technology nanotechnology
- natural sciences chemical sciences inorganic chemistry metalloids
- natural sciences computer and information sciences software software applications simulation software
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
FP6-2004-IST-NMP-2
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
WITNEY OXFORDSHIRE
United Kingdom
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.