Community Research and Development Information Service - CORDIS

Atom Probe Tomography (APT) Metrology for future 3D semiconductor devices

From 2015-08-01 to 2017-07-31, closed project

Project details

Total cost:

EUR 160 800

EU contribution:

EUR 160 800

Coordinated in:

Belgium

Call for proposal:

H2020-MSCA-IF-2014See other projects for this call

Funding scheme:

MSCA-IF-EF-ST - Standard EF

Objective

Coordinator

INTERUNIVERSITAIR MICRO-ELECTRONICACENTRUM IMEC VZW
Belgium

EU contribution: EUR 160 800


KAPELDREEF 75
3001 LEUVEN
Belgium
Activity type: Research Organisations

Contact the organisation

Follow us on: RSS Facebook Twitter YouTube Managed by the EU Publications Office Top