Objective
General Goals
Lab4MEMS will feature the Pilot Line for innovative technologies on advanced piezoelectric and magnetic materials, expected to fuel the next generation’s smart sensors and actuators based on MEMS:
1. Micro-actuators, micro-pumps, sensors and electrical power generators, integrated on silicon-based piezoelectric materials (PZT)
• for use in Data Storage, Ink Jet, Health Care, Automotive and Energy Scavenging
2. Magnetic field sensors integrated on silicon-based Anisotropic Magneto Resistance (AMR) materials.
• for use in consumer applications such as GPS positioning and mobile phones
3. Advanced packaging technologies and vertical interconnections (flip chip, Through Silicon Vias or Through Mold Vias) for full 3D integration.
• For use in CONSUMER and HEALTHCARE application such as body area sensors and remote monitoring.
Lab4MEMS will be promoted as an add-on to the current Manufacturing facilities located in each respective participating countries, aiming to implement and optimize the industrial processes and to validate the demonstrators suitable to penetrate the market.
Potential impact:
This pilot line will fit a new set of R&D equipments and tools for PZT and AMR, as part of a larger manufacturing facility already in place in Agrate Brianza (Italy) for high volume 3-axis MEMS accelerometers and gyroscope (i.e. >100M devices/month). This strategy will allow increasing and maintaining the know-how on those very strategic enabling technologies, combining scientific skills with the ability to design and manufacture a wide range of smart micro-nano systems on silicon.
The Lab4MEMS Pilot Line will be based on 200 mm wafer scale (with a forward looking impact analysis for a future move to 300mm wafer) and it will process more than 600 wafers/week, once in operation.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering sensors smart sensors
- engineering and technology electrical engineering, electronic engineering, information engineering information engineering telecommunications mobile phones
- natural sciences chemical sciences inorganic chemistry metalloids
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
ENIAC-2012-2
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Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)
Coordinator
20864 Agrate Brianza
Italy
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Participants (20)
10129 Torino
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10129 Torino
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16163 GENOVA
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20133 Milano
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40125 BOLOGNA
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75015 Paris
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33608 PESSAC
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MSD 2080 MSIDA
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7521 PE Enschede
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5211 VW 'S-HERTOGENBOSCH
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01510 Vantaa
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01620 Vantaa
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02150 Espoo
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3001 Heverlee
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060042 Bucharest
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02668 WARSZAWA
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7034 Trondheim
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0283 Oslo
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6240 RADFELD/TIROL
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