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LAB FAB for smart sensors and actuators MEMS

Objective

General Goals
Lab4MEMS will feature the Pilot Line for innovative technologies on advanced piezoelectric and magnetic materials, expected to fuel the next generation’s smart sensors and actuators based on MEMS:
1. Micro-actuators, micro-pumps, sensors and electrical power generators, integrated on silicon-based piezoelectric materials (PZT)
• for use in Data Storage, Ink Jet, Health Care, Automotive and Energy Scavenging
2. Magnetic field sensors integrated on silicon-based Anisotropic Magneto Resistance (AMR) materials.
• for use in consumer applications such as GPS positioning and mobile phones
3. Advanced packaging technologies and vertical interconnections (flip chip, Through Silicon Vias or Through Mold Vias) for full 3D integration.
• For use in CONSUMER and HEALTHCARE application such as body area sensors and remote monitoring.
Lab4MEMS will be promoted as an add-on to the current Manufacturing facilities located in each respective participating countries, aiming to implement and optimize the industrial processes and to validate the demonstrators suitable to penetrate the market.
Potential impact:
This pilot line will fit a new set of R&D equipments and tools for PZT and AMR, as part of a larger manufacturing facility already in place in Agrate Brianza (Italy) for high volume 3-axis MEMS accelerometers and gyroscope (i.e. >100M devices/month). This strategy will allow increasing and maintaining the know-how on those very strategic enabling technologies, combining scientific skills with the ability to design and manufacture a wide range of smart micro-nano systems on silicon.
The Lab4MEMS Pilot Line will be based on 200 mm wafer scale (with a forward looking impact analysis for a future move to 300mm wafer) and it will process more than 600 wafers/week, once in operation.

Field of science

  • /social sciences/economics and business/business and management/commerce
  • /natural sciences/chemical sciences/inorganic chemistry/inorganic compounds
  • /engineering and technology/electrical engineering, electronic engineering, information engineering/information engineering/telecommunications/mobile phone

Call for proposal

ENIAC-2012-2
See other projects for this call

Funding Scheme

JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)

Coordinator

STMICROELECTRONICS SRL
Address
Via C.olivetti 2
20864 Agrate Brianza
Italy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 836 340
Administrative Contact

Participants (20)

ST-POLITO Societa' consortile a r.l.
Italy
EU contribution
€ 42 452
Address
Corso Duca Degli Abruzzi 24
10129 Torino
Activity type
Research Organisations
Administrative Contact
POLITECNICO DI TORINO
Italy
EU contribution
€ 79 050
Address
Corso Duca Degli Abruzzi 24
10129 Torino
Activity type
Higher or Secondary Education Establishments
Administrative Contact
FONDAZIONE ISTITUTO ITALIANO DI TECNOLOGIA
Italy
EU contribution
€ 56 213
Address
Via Morego 30
16163 Genova
Activity type
Research Organisations
Administrative Contact
POLITECNICO DI MILANO
Italy
EU contribution
€ 70 500
Address
Piazza Leonardo Da Vinci 32
20133 Milano
Activity type
Higher or Secondary Education Establishments
Administrative Contact
CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA
Italy
EU contribution
€ 202 425
Address
Via Toffano 2
40125 Bologna
Activity type
Research Organisations
Administrative Contact
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
EU contribution
€ 148 931
Address
Rue Leblanc 25
75015 Paris 15
Activity type
Research Organisations
Administrative Contact
SERMA Technologies SA
France
EU contribution
€ 182 053
Address
Gustave Eiffel 30
33608 Pessac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
STMicroelectronics Ltd.
Malta
EU contribution
€ 642 857
Address
Industry Road -
KKP9042 Kirkop
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
UNIVERSITA TA MALTA
Malta
EU contribution
€ 44 118
Address
University Campus, Tal-qroqq
2080 Msida
Activity type
Higher or Secondary Education Establishments
Administrative Contact
SOLMATES BV
Netherlands
EU contribution
€ 69 563
Address
Auke Vleerstraat 3
7521 PE Enschede
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Cavendish Kinetics B.V.
Netherlands
EU contribution
€ 170 880
Address
Emmaplein 4C
5211 VW 'S-hertogenbosch
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
OKMETIC OY
Finland
EU contribution
€ 225 981
Address
Piitie 2
01510 Vantaa
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
MURATA ELECTRONICS OY
Finland
EU contribution
€ 204 473
Address
Myllynkivenkuja 6
01620 Vantaa
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
PICOSUN OY
Finland
EU contribution
€ 137 835
Address
Tietotie 3
02150 Espoo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ICOS VISION SYSTEMS NV
Belgium
EU contribution
€ 351 540
Address
Esperantolaan 8C
3001 Heverlee
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
UNIVERSITATEA POLITEHNICA DIN BUCURESTI
Romania
EU contribution
€ 79 412
Address
Splaiul Independentei 313 Sect 6
060042 Bucharest
Activity type
Higher or Secondary Education Establishments
Administrative Contact
SIEC BADAWCZA LUKASIEWICZ - INSTYTUT TECHNOLOGII ELEKTRONOWEJ
Poland
EU contribution
€ 109 800
Address
Ulica Aleja Lotnikow 32-46
02668 Warszawa
Activity type
Research Organisations
Administrative Contact
STIFTELSEN SINTEF
Norway
EU contribution
€ 250 200
Address
Strindveien 4
7034 Trondheim
Activity type
Research Organisations
Administrative Contact
SONITOR TECHNOLOGIES AS
Norway
EU contribution
€ 71 240
Address
Forskningsveien 1B
0314 Oslo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Datacon Technology GmbH
Austria
EU contribution
€ 298 600
Address
Innstrasse 16
6240 Radfeld/tirol
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact