Project description DEENESFRITPL First demonstration of porous crystalline film growth from the vapour phase Many innovative concepts and even physically realisable systems reach a barrier to commercialisation when they are not amenable to low-cost, high-scale manufacturing methods that support integration into other components. Metal-organic frameworks (MOFs), crystalline solids with highly regular pores in the nanometre range, are among these. The virtually limitless combination of organic and inorganic components in a porous structure promises success in highly sensitive and specific gas sensing, purification, separation, and catalysis applications. The ERC-funded VAPORE project will extend these applications to microelectronics by growing porous crystalline films from the vapour phase for the first time. Its solvent-free chemical vapor deposition route for MOF films will pave the way to MOFs integrated in microelectronics. Show the project objective Hide the project objective Objective Metal-organic frameworks (MOFs) are crystalline solids with highly regular pores in the nanometer range. The possibility to create a tailored nano-environment inside the MOF pores makes these materials high-potential candidates for integration with microelectronics, e.g. as sensor coatings, solid electrolytes, etc. However, current solvent-based methods for MOF film deposition, a key enabling step in device integration, are incompatible with microelectronics fabrication because of contamination and corrosion issues.VAPORE will open up the path to integrate MOFs in microelectronics by developing a solvent-free chemical vapor deposition (CVD) route for MOF films. MOF-CVD will be the first example of vapor-phase deposition of any type of microporous crystalline network solid and marks an important milestone in processing such materials. Development of the MOF-CVD technology platform will start from a proof-of-concept case and will be supported by the following pillars: (1) Insight in the process, (2) expansion of the materials scope and (3) fine-tuning process control. The potential of MOF-CVD coatings will be illustrated in proof-of-concept sensors.In summary, by growing porous crystalline films from the vapor phase for the first time, VAPORE implements molecular self-assembly as a scalable tool to fabricate highly controlled nanopores. In doing so, the project will enable cross-fertilization between the worlds of nanoscale chemistry and microelectronics, two previously incompatible fields. Fields of science engineering and technologynanotechnologynano-processesengineering and technologymaterials engineeringcoating and filmsengineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensorsnatural sciencesphysical scienceselectromagnetism and electronicsmicroelectronicsengineering and technologychemical engineeringchemical process engineering Keywords porous crystalline materials microporous materials metal-organic frameworks MOFs porous coordination polymers Programme(s) H2020-EU.1.1. - EXCELLENT SCIENCE - European Research Council (ERC) Main Programme Topic(s) ERC-2016-STG - ERC Starting Grant Call for proposal ERC-2016-STG See other projects for this call Funding Scheme ERC-STG - Starting Grant Host institution KATHOLIEKE UNIVERSITEIT LEUVEN Net EU contribution € 1 787 475,00 Address OUDE MARKT 13 3000 Leuven Belgium See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Higher or Secondary Education Establishments Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 1 787 475,00 Beneficiaries (1) Sort alphabetically Sort by Net EU contribution Expand all Collapse all KATHOLIEKE UNIVERSITEIT LEUVEN Belgium Net EU contribution € 1 787 475,00 Address OUDE MARKT 13 3000 Leuven See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Higher or Secondary Education Establishments Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 1 787 475,00
