Objective
"This proposal targets the development of flexible heterogeneous integration schemes for combining best-of-class materials, components and manufacturing methods into economically viable micro- and nanosystem (MEMS) solutions.
Today, the IC industry drives the development of most micro- and nanofabrication technologies, which are characterized by standardized processes, very large production volumes of >10.000 wafers/month and enormous capital investments. In contrast, the vast majority of MEMS demand production volumes of <100 wafers/month and different manufacturing and integration processes for each type of device. The a-priori acceptance of IC manufacturing technologies for MEMS therefore leads to missed market opportunities for many moderate volume MEMS-based products and to sub-optimal material choices.
Instead, we aim for a new MEMS-specific integration and manufacturing paradigm, in which the technologies and tools are adapted to the production volumes and design variations of MEMS devices. Specifically, we will develop novel and enabling micro/nano fabrication and integration techniques with a focus on flexibility and cost-efficiency in the following areas:
"" Heterogeneous Material Integration, where we incorporate high-performance materials into MEMS using unconventional and innovative technologies and tools, including serial integration, wafer-level integration and free-form fabrication of MEMS;
"" Heterogeneous System Integration, where we develop new wafer level schemes to combine, process and interconnect components fabricated with different technologies such as MEMS, NEMS, ICs or photonics;
"" Lab-on-Chip Integration, in which transducers, mass transport solutions, surface biochemistry and liquids are combined at the wafer level into high-performance systems."
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
- natural sciences biological sciences biochemistry
- engineering and technology other engineering and technologies microtechnology lab on a chip
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
ERC-2010-AdG_20100224
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Host institution
100 44 STOCKHOLM
Sweden
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.