Experimental pilot line for devices based on graphene, related 2d materials and heterostructures

The Graphene Framework Partnership Agreement (FPA) consortium will be invited to submit a proposal for a Specific Grant Agreement (SGA) aiming to establish a dedicated graphene and related materials (GRMs) experimental pilot line.

The target of this experimental pilot line is to have a simple baseline process ready in two years (from start of the project) and the full flow should be ready during the lifetime of the Graphene Flagship. The development and operation of the experimental pilot line will be coordinated closely with the core project of the Flagship.

This action must build the tool kit and design manual necessary for creating prototype devices and integrated circuits, and assess their performance and their ability to cover the device requirements of the targeted applications. The action should be capable of multiple wafer runs per year.

The action will require expertise in the area of manufacturing flows, with two-dimensional materials and with issues regarding reliability, versatility, process control and minimizing lead times. Where necessary such expertise should be brought into the consortium.

The aim is to establish a first of its kind GRMs experimental manufacturing facility, where European companies, research centres and academic institutions, also those outside the Flagship, can produce novel devices on a pilot scale based on a shared cost model between users and service providers. This pilot line would be used for all-on-chip applications in areas such as opto-electronics, sensors, and data communication, and should be able to cover the device requirements of most of these applications. It should be built on existing activities under the Flagship FPA, and approaches pursued in the pilot line should be complementary to those developed in other parts of the Flagship. Indicators should be provided to put in place an effective monitoring of the action in the context of the Flagship. The proposal should describe a sustainable model of functioning beyond the project lifetime and include activities during the lifetime of the project that would pave the ground for transferring the pilot to an industrial production environment; examples include addressing issues such as roadblocks to overcome for achieving a full industrial line, relevant cost issues and market perspectives, potential business partners; etc.

Expected Impact:

• Enabling system prototype demonstration on an operational environment (moving to an 80% yield after three years), speeding up significantly the adoption of the technology, in particular by the semiconductor industry;
• Supporting start-ups and spin-offs by enabling prototyping, pilot studies and small-volume production of integrated systems;
• Creating a shared process production platform, manufacturing flow and process design kit, creating synergy across European research efforts and fostering knowledge accumulation, IPR creation and collaboration;
• Catalysing the expertise existing in Europe regarding growing, transferring and encapsulation;
• A greater diversity of sectors able to take advantage, reflected in the users of the experimental pilot line.