Obiettivo The project aims to develop next generation capacitive MEMS components for precision applications. The industries directly targeted are MEMS sensor industry and test & measurement industry. In addition to generic MEMS process technology suitable to any capacitive sensor fabrication, the project intends to develop prototype components for high precision dc, low frequency and rf/microwave voltage and field measurements.OBJECTIVESThe project will open new application fields for the microsystem technology by improving the electromechanical stability of micromechanical capacitive transducers that are generic building blocks of Micro Electro Mechanical Systems (MEMS).The specific objectives are:1) To develop MEMS sensor technology for precision applications by improving the electromechanical stability of micromechanical capacitive transducers;2) To apply the technology in new types of electrical references for dc, low-frequency and high-frequency test and measurement applications;3) To analyse the potential of developed components and solutions in existing and novel industrial products and applications.DESCRIPTION OF WORK- Definition of target specifications for processes and components;-Definition of process requirements;- Analysis of instability components of present MEMS technology;- Development of MEMS process technology with improved properties for low frequency and high frequency applications. Design and fabrication of the new dc, low-frequency and high-frequency components (2 generations).Characterisation of the properties of the components using high-precision measurements. Exploitation plan for the process and component technology. Campo scientifico engineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensors Programma(i) FP5-IST - Programme for research, technological development and demonstration on a "User-friendly information society, 1998-2002" Argomento(i) Data not available Invito a presentare proposte Data not available Meccanismo di finanziamento CSC - Cost-sharing contracts Coordinatore VALTION TEKNILLINEN TUTKIMUSKESKUS (VTT) Contributo UE Nessun dato Indirizzo VUORIMIEHENTIE 5 02044 ESPOO Finlandia Mostra sulla mappa Costo totale Nessun dato Partecipanti (6) Classifica in ordine alfabetico Classifica per Contributo UE Espandi tutto Riduci tutto CENTRE FOR METROLOGY AND ACCREDITATION Finlandia Contributo UE Nessun dato Indirizzo LONNROTINKATU 37 00181 HELSINKI Mostra sulla mappa Costo totale Nessun dato FLUKE PRECISION MEASUREMENT LIMITED Regno Unito Contributo UE Nessun dato Indirizzo 52 HURRICANE WAY, NORWICH AIRPORT NR6 6JB NORWICH, NORFOLK Mostra sulla mappa Costo totale Nessun dato NEDERLANDS MEETINSTITUUT B.V. Paesi Bassi Contributo UE Nessun dato Indirizzo SCHOEMAKERSTRAAT 97 2600 AR DELFT Mostra sulla mappa Costo totale Nessun dato PHYSIKALISCH-TECHNISCHE BUNDESANSTALT Germania Contributo UE Nessun dato Indirizzo BUNDESALLEE 100 38116 BRAUNSCHWEIG Mostra sulla mappa Costo totale Nessun dato UNIVERSITEIT TWENTE Paesi Bassi Contributo UE Nessun dato Indirizzo DRIENERLOLAAN 5 7522 NB ENSCHEDE Mostra sulla mappa Costo totale Nessun dato VTI TECHNOLOGIES OY Finlandia Contributo UE Nessun dato Indirizzo MYLLYKIVENKUJA 6 01620 VANTAA Mostra sulla mappa Costo totale Nessun dato
