ASAC - a new analySIS module for TEM applications
Mechanical stress that has built up in layers and substrates influences yield, device performance and stability, as well as product reliability in deep-sub-micron integrated-circuit (IC) technologies. This is why it is important to calculate a quantitative account of these stresses. This can only be achieved by making use of: ,- reliable and quantitative techniques for local stress determination in the substrate; ,- of adequate and dedicated process simulation tools; ,- and of sensitive methods for analyzing stress effects on device performance. ,In order to accomplish this task, asac provides an experimental method of the TEM (Transmission Electron Microscopy) convergent-beam-diffraction technique for measuring lattice strain with a precision of 2x10-4. asac analyzes convergent beam electron diffraction TEM images of Si (130) and (230) acquired at 100keV and 200keV. The algorithm detects the HOLZ (High Ordered Laue Zone) lines automatically and highly precisely. Results are obtained within minutes. The software calculates the effective voltage and the strain tensor and its trace. The strain values can be visualized as coloured points within an overview image or exported in a data sheet. Additional zone axes like (5,6,0) and/or (3,4,0) for Silicon will be implemented in the near future.Soft Imaging System is a company specializing in image-analytical hardware and software systems. This includes the development, marketing and sales of image-analysis, image-processing and image-archiving systems along with image-analytical devices. Consultation, system integration, installation and training courses are a part of the range of products and services on offer. Soft Imaging System is active in markets around the world and currently operates offices in Europe, the United States, Asia and Australia along with a global network of local sales partners. The European-developed software and hardware has its main emphasis on efficient digital integration of all system components. These system solutions are used particularly in the fields of quality control, materials sciences, the life sciences and in the semi-conductor industry.
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Germany