Fraunhofer IPMS presents MEMS mirrors at the Micromachining/MEMS 2008 in Tokyo/Japan
30 July 2008 - 1 August 2008
Austria
At the Micromachining/MEMS show the Fraunhofer IPMS presents 1D and 2D Micro Scanning Mirrors
The resonantly driven Micro Scan¬ning Mirror is designed for pe¬riodical deflection of light. The actuator chip is fabricated with a CMOS compatible micromachining technology. A circular respectively elliptic silicon plate serves as mir¬ror plate and is suspended by two torsional springs. In the case of the 2D Scanner a gimbal mounting of the mirror plate is used. The oscillation of the plate is excited electrostatically. As all the mechanical parts are made of single crystal silicon the devices show a very high robustness and long-term stability. A demonstrator with a large optical scan range of 120° optically will be shown at the booth.
“The tiny dimensions of the mirrors enable totally new application fields as the integration of mirror based laser projection modules into mobile phones, miniaturized spectrometer or scanning photon microscopes“, explaines Dr. Harald Schenk, Fraunhofer IPMS´ deputy director.
The resonantly driven Micro Scan¬ning Mirror is designed for pe¬riodical deflection of light. The actuator chip is fabricated with a CMOS compatible micromachining technology. A circular respectively elliptic silicon plate serves as mir¬ror plate and is suspended by two torsional springs. In the case of the 2D Scanner a gimbal mounting of the mirror plate is used. The oscillation of the plate is excited electrostatically. As all the mechanical parts are made of single crystal silicon the devices show a very high robustness and long-term stability. A demonstrator with a large optical scan range of 120° optically will be shown at the booth.
“The tiny dimensions of the mirrors enable totally new application fields as the integration of mirror based laser projection modules into mobile phones, miniaturized spectrometer or scanning photon microscopes“, explaines Dr. Harald Schenk, Fraunhofer IPMS´ deputy director.