Periodic Reporting for period 2 - MAGNIFIC (Materials for a next-generation (nano-)opto-electro-mechanical systems)
Reporting period: 2024-06-01 to 2025-11-30
Modern communication systems such as 5G/6G networks and satellite communications (SATCOM) require hardware components that can operate at very high frequencies while consuming minimal power and remaining compatible with large-scale silicon manufacturing. Existing solutions struggle to combine miniaturization, energy efficiency, and seamless integration with photonic and electronic technologies, creating a bottleneck for future communication infrastructures.
The MAGNIFIC project addresses this challenge by developing a new technological platform based on nano-electro-opto-mechanical systems (NOEMS). These devices exploit mechanical vibrations at gigahertz frequencies to enable compact, low-power signal processing functions such as frequency generation, modulation, and conversion. MAGNIFIC introduces nanocrystalline silicon as a key enabling material, combined with piezoelectric aluminium nitride, to achieve strong coupling between electrical, optical, and mechanical domains using processes compatible with existing semiconductor fabrication.
The overall objectives of MAGNIFIC are twofold. First, the project aims to establish a robust NOEMS technology by understanding and optimizing the material properties, device architectures, and fabrication tolerances required for reliable gigahertz operation. Second, it seeks to validate this technology in application-relevant scenarios, specifically targeting 5G wireless systems and SATCOM payloads, progressing toward technology readiness level 5.
By bridging fundamental materials research with device engineering and system-level requirements, MAGNIFIC contributes to Europe’s strategic goals in advanced photonics, digital connectivity, and technological sovereignty. The project is expected to enable future communication systems that are more energy-efficient, scalable, and resilient, supporting both commercial and societal needs.
The MAGNIFIC project addresses this challenge by developing a new technological platform based on nano-electro-opto-mechanical systems (NOEMS). These devices exploit mechanical vibrations at gigahertz frequencies to enable compact, low-power signal processing functions such as frequency generation, modulation, and conversion. MAGNIFIC introduces nanocrystalline silicon as a key enabling material, combined with piezoelectric aluminium nitride, to achieve strong coupling between electrical, optical, and mechanical domains using processes compatible with existing semiconductor fabrication.
The overall objectives of MAGNIFIC are twofold. First, the project aims to establish a robust NOEMS technology by understanding and optimizing the material properties, device architectures, and fabrication tolerances required for reliable gigahertz operation. Second, it seeks to validate this technology in application-relevant scenarios, specifically targeting 5G wireless systems and SATCOM payloads, progressing toward technology readiness level 5.
By bridging fundamental materials research with device engineering and system-level requirements, MAGNIFIC contributes to Europe’s strategic goals in advanced photonics, digital connectivity, and technological sovereignty. The project is expected to enable future communication systems that are more energy-efficient, scalable, and resilient, supporting both commercial and societal needs.
MAGNIFIC achieved significant scientific and technological progress across materials development, device design, modelling, and experimental validation.
A comprehensive investigation of nanocrystalline silicon was carried out to understand how its internal structure affects optical, mechanical, and electrical performance. Advanced microscopy, spectroscopy, and modelling techniques revealed the role of grain boundaries in energy dissipation and frequency stability. These insights provide essential design rules for low-loss, high-frequency NOEMS devices.
Building on this foundation, the consortium developed and optimized novel optomechanical cavity architectures operating in the multi-gigahertz range. Devices targeting both terrestrial wireless frequencies (3–6 GHz) and SATCOM-relevant bands (8–12 GHz) were designed and numerically validated. Experimental results demonstrated efficient excitation of nanoscale mechanical modes using integrated bulk acoustic transducers, achieving coupling efficiencies significantly higher than conventional approaches.
In parallel, predictive models were established to quantify the impact of fabrication variability on device performance. These models were validated experimentally and enable the identification of critical parameters and tolerance windows, improving reproducibility and reliability for future manufacturing.
Finally, application-driven requirements for device packaging and environmental robustness were defined, particularly for SATCOM use cases. These specifications guide the ongoing transition from laboratory prototypes toward fully packaged demonstrators.
Overall, the work performed during the reporting period consolidated the MAGNIFIC technology platform and positioned the project for demonstrator realization in the next phase, advancing Europe’s capabilities in high-frequency, energy-efficient communication hardware.
A comprehensive investigation of nanocrystalline silicon was carried out to understand how its internal structure affects optical, mechanical, and electrical performance. Advanced microscopy, spectroscopy, and modelling techniques revealed the role of grain boundaries in energy dissipation and frequency stability. These insights provide essential design rules for low-loss, high-frequency NOEMS devices.
Building on this foundation, the consortium developed and optimized novel optomechanical cavity architectures operating in the multi-gigahertz range. Devices targeting both terrestrial wireless frequencies (3–6 GHz) and SATCOM-relevant bands (8–12 GHz) were designed and numerically validated. Experimental results demonstrated efficient excitation of nanoscale mechanical modes using integrated bulk acoustic transducers, achieving coupling efficiencies significantly higher than conventional approaches.
In parallel, predictive models were established to quantify the impact of fabrication variability on device performance. These models were validated experimentally and enable the identification of critical parameters and tolerance windows, improving reproducibility and reliability for future manufacturing.
Finally, application-driven requirements for device packaging and environmental robustness were defined, particularly for SATCOM use cases. These specifications guide the ongoing transition from laboratory prototypes toward fully packaged demonstrators.
Overall, the work performed during the reporting period consolidated the MAGNIFIC technology platform and positioned the project for demonstrator realization in the next phase, advancing Europe’s capabilities in high-frequency, energy-efficient communication hardware.
MAGNIFIC has delivered results that go beyond the current state of the art in nano-electro-opto-mechanical systems by demonstrating how gigahertz mechanical functionality can be reliably integrated within silicon-based photonic platforms.
A key advance lies in the use of nanocrystalline silicon as an active material for high-frequency NOEMS. Unlike conventional crystalline silicon approaches, MAGNIFIC demonstrated that nanocrystalline silicon enables strong electromechanical and optomechanical interactions while remaining compatible with scalable semiconductor manufacturing. The project provided new insights into how material microstructure influences frequency stability, losses, and long-term performance—knowledge that was previously unavailable at these frequencies.
Another major result is the development of novel device architectures capable of operating efficiently in frequency ranges relevant for both terrestrial wireless systems and satellite communications. The project demonstrated efficient electrical excitation of nanoscale mechanical resonators at multi-GHz frequencies using integrated acoustic transducers, surpassing the limitations of traditional surface-based actuation methods. This represents a significant step forward for compact, low-power signal processing technologies.
Beyond the technical advances, MAGNIFIC identified key needs to ensure further uptake and success of the results:
- Further demonstration and validation, including fully packaged devices and environmental testing, to move toward industrial deployment.
- Access to pilot fabrication lines and industrial foundries to support scale-up and reproducibility.
- Targeted IPR protection to secure commercial exploitation opportunities.
- Engagement with telecom and space system integrators to align performance metrics with real application requirements.
A key advance lies in the use of nanocrystalline silicon as an active material for high-frequency NOEMS. Unlike conventional crystalline silicon approaches, MAGNIFIC demonstrated that nanocrystalline silicon enables strong electromechanical and optomechanical interactions while remaining compatible with scalable semiconductor manufacturing. The project provided new insights into how material microstructure influences frequency stability, losses, and long-term performance—knowledge that was previously unavailable at these frequencies.
Another major result is the development of novel device architectures capable of operating efficiently in frequency ranges relevant for both terrestrial wireless systems and satellite communications. The project demonstrated efficient electrical excitation of nanoscale mechanical resonators at multi-GHz frequencies using integrated acoustic transducers, surpassing the limitations of traditional surface-based actuation methods. This represents a significant step forward for compact, low-power signal processing technologies.
Beyond the technical advances, MAGNIFIC identified key needs to ensure further uptake and success of the results:
- Further demonstration and validation, including fully packaged devices and environmental testing, to move toward industrial deployment.
- Access to pilot fabrication lines and industrial foundries to support scale-up and reproducibility.
- Targeted IPR protection to secure commercial exploitation opportunities.
- Engagement with telecom and space system integrators to align performance metrics with real application requirements.